Issued Patents All Time
Showing 1–25 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12421609 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsuro SEINO, Takuya JODA | 2025-09-23 |
| 12278108 | Substrate processing method, method of manufacturing semiconductor device, non- transitory computer-readable recording medium and substrate processing apparatus | Kota KOWA | 2025-04-15 |
| 12170206 | Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Norikazu Mizuno, Atsuhiko Ashitani, Atsuro SEINO, Kota KOWA | 2024-12-17 |
| 12148614 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Takuya JODA, Norikazu Mizuno, Shogo HAYASAKA, Koei KURIBAYASHI | 2024-11-19 |
| 12148621 | Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Koei KURIBAYASHI, Atsuro SEINO | 2024-11-19 |
| 12139792 | Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | — | 2024-11-12 |
| 12084760 | Method of processing substrate, recording medium, substrate processing apparatus, and method of manufacturing semiconductor device | Takuya JODA, Atsuro SEINO | 2024-09-10 |
| 12084757 | Method of manufacturing semiconductor device, substrate processing apparatus, method of processing substrate, and recording medium | Atsuro SEINO | 2024-09-10 |
| 12080555 | Method of manufacturing semiconductor device, non-transitory computer-readable recording medium and substrate processing apparatus | — | 2024-09-03 |
| 11967500 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsuro SEINO | 2024-04-23 |
| 11915938 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsuro SEINO | 2024-02-27 |
| 11908737 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | — | 2024-02-20 |
| 11621169 | Method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Koei KURIBAYASHI, Atsuro SEINO | 2023-04-04 |
| 11538688 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsuro SEINO | 2022-12-27 |
| 11424127 | Method of manufacturing semiconductor device, substrate processing apparatus, method of processing substrate, and recording medium | Atsuro SEINO | 2022-08-23 |
| 11393719 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | — | 2022-07-19 |
| 11004676 | Method for manufacturing semiconductor device, non-transitory computer-readable recording medium, and substrate processing apparatus | Yukinao KAGA, Kazuhiro Harada, Motomu DEGAI | 2021-05-11 |
| 10734218 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsuro SEINO | 2020-08-04 |
| 10410870 | Method of manufacturing semiconductor device | Atsuro SEINO | 2019-09-10 |
| 10388530 | Method of manufacturing semiconductor device and substrate processing apparatus | Kazuhiro Harada, Yukinao KAGA, Hideharu Itatani, Hiroshi Ashihara | 2019-08-20 |
| 10366894 | Method of manufacturing semiconductor device, substrate processing device, and recording medium | Yukinao KAGA | 2019-07-30 |
| 10121651 | Method of manufacturing semiconductor device | Shin Hiyama | 2018-11-06 |
| 10014226 | Method of manufacturing semiconductor device | — | 2018-07-03 |
| 9972500 | Method of manufacturing semiconductor device | Yukinao KAGA, Atsuro SEINO, Atsuhiko Ashitani, Ryohei Maeno, Masanori Sakai | 2018-05-15 |
| 9970107 | Method of manufacturing semiconductor device | Atsuro SEINO | 2018-05-15 |