Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170206 | Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Arito OGAWA, Norikazu Mizuno, Atsuro SEINO, Kota KOWA | 2024-12-17 |
| 9972500 | Method of manufacturing semiconductor device | Yukinao KAGA, Arito OGAWA, Atsuro SEINO, Ryohei Maeno, Masanori Sakai | 2018-05-15 |
| 9508555 | Method of manufacturing semiconductor device | Yukinao KAGA, Arito OGAWA, Atsuro SEINO, Ryohei Maeno, Masanori Sakai | 2016-11-29 |
| D610559 | Reaction tube | Satoshi Okada, Yuji Takebayashi, Tsutomu Kato, Shintaro Kogura | 2010-02-23 |