Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170206 | Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Arito OGAWA, Atsuhiko Ashitani, Atsuro SEINO, Kota KOWA | 2024-12-17 |
| 12148614 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Takuya JODA, Arito OGAWA, Shogo HAYASAKA, Koei KURIBAYASHI | 2024-11-19 |
| 12142476 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masayuki Asai, Tomoki IMAMURA, Kazuyuki Okuda, Yasuhiro Inokuchi | 2024-11-12 |
| 11705325 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masayuki Asai, Tomoki IMAMURA, Kazuyuki Okuda, Yasuhiro Inokuchi | 2023-07-18 |
| 11527401 | Method of processing substate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masayuki Asai, Tomoki IMAMURA, Kazuyuki Okuda, Yasuhiro Inokuchi | 2022-12-13 |
| 9548198 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Kazutaka Yanagita, Shingo Okubo | 2017-01-17 |
| 9396929 | Method of manufacturing a semiconductor device, substrate processing apparatus and recording medium | Yoshiro Hirose, Kazutaka Yanagita, Katsuko Higashino | 2016-07-19 |
| 9343290 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Kazutaka Yanagita, Shingo Okubo | 2016-05-17 |
| 9334567 | Method for manufacturing semiconductor device, method for processing substrate and substrate processing apparatus | Yoshiro Hirose, Kenji Kanayama, Yushin Takasawa, Yosuke Ota | 2016-05-10 |
| 9263251 | Method of manufacturing semiconductor device, semiconductor device and substrate processing apparatus | Tomohide Kato, Takaaki Noda | 2016-02-16 |
| 9217199 | Substrate processing apparatus | Yoshiro Hirose, Kenji Kanayama, Yushin Takasawa, Yosuke Ota | 2015-12-22 |
| 9123531 | Method of manufacturing semiconductor device, semiconductor device and substrate processing apparatus | Tomohide Kato, Takaaki Noda | 2015-09-01 |
| 9018104 | Method for manufacturing semiconductor device, method for processing substrate and substrate processing apparatus | Yoshiro Hirose, Kenji Kanayama, Yushin Takasawa, Yosuke Ota | 2015-04-28 |
| 8847343 | Method of manufacturing semiconductor device, semiconductor device and substrate processing apparatus | Tomohide Kato, Takaaki Noda | 2014-09-30 |
| 8557716 | Semiconductor device manufacturing method and substrate processing apparatus | — | 2013-10-15 |
| 8535479 | Manufacturing method of semiconductor device, and semiconductor device | Kenji Kanayama, Kazuyuki Okuda, Yoshiro Hirose, Masayuki Asai | 2013-09-17 |
| 8349544 | Method of manufacturing semiconductor device | — | 2013-01-08 |
| 8227346 | Method of producing semiconductor device | Hironobu Miya, Kazuyuki Toyoda, Taketoshi Sato, Masanori Sakai, Masayuki Asai +2 more | 2012-07-24 |
| 8176871 | Substrate processing apparatus | Kazuyuki Okuda | 2012-05-15 |
| 8105957 | Method of producing semiconductor device | Hironobu Miya, Kazuyuki Toyoda, Taketoshi Sato, Masayuki Asai, Masanori Sakai +2 more | 2012-01-31 |
| 8093159 | Manufacturing method of semiconductor device, and semiconductor device | Kenji Kanayama, Kazuyuki Okuda, Yoshiro Hirose, Masayuki Asai | 2012-01-10 |
| 8058184 | Semiconductor device producing method | Hironobu Miya, Masayuki Asai | 2011-11-15 |
| 8039404 | Production method for semiconductor device | Hironobu Miya, Kazuyuki Toyoda, Taketoshi Sato, Masanori Sakai, Masayuki Asai +2 more | 2011-10-18 |
| 7892983 | Substrate processing apparatus and producing method of semiconductor device | Hironobu Miya, Taketoshi Sato, Masanori Sakai, Takaaki Noda | 2011-02-22 |
| 7779785 | Production method for semiconductor device and substrate processing apparatus | Hironobu Miya, Kazuyuki Toyoda, Taketoshi Sato, Masanori Sakai, Masayuki Asai +2 more | 2010-08-24 |