Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9396929 | Method of manufacturing a semiconductor device, substrate processing apparatus and recording medium | Yoshiro Hirose, Norikazu Mizuno, Kazutaka Yanagita | 2016-07-19 |
| 8815751 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording medium | Yoshiro Hirose, Atsushi Sano, Kazutaka Yanagita | 2014-08-26 |