Issued Patents All Time
Showing 1–25 of 58 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11819838 | Precursor supply system and precursors supply method | Toshiyuki Nakagawa, Kouki Morimoto, Takashi Kameoka, Yuki Kumamoto, Kazuma SUZUKI +1 more | 2023-11-21 |
| 9633838 | Vapor deposition of silicon-containing films using penta-substituted disilanes | Jean-Marc Girard, Changhee Ko, Ivan Oshchepkov, Shingo Okubo, Naoto NODA +1 more | 2017-04-25 |
| 9548198 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Norikazu Mizuno, Shingo Okubo | 2017-01-17 |
| 9396929 | Method of manufacturing a semiconductor device, substrate processing apparatus and recording medium | Yoshiro Hirose, Norikazu Mizuno, Katsuko Higashino | 2016-07-19 |
| 9343290 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Norikazu Mizuno, Shingo Okubo | 2016-05-17 |
| 9109281 | Metal heterocyclic compounds for deposition of thin films | Julien Gatineau, Shingo Okubo | 2015-08-18 |
| 9000201 | Adsorbent for removing metal compounds and method for same | Yoichi Sakata, Haruto Wakabayashi | 2015-04-07 |
| 8815751 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording medium | Yoshiro Hirose, Atsushi Sano, Katsuko Higashino | 2014-08-26 |
| 8636845 | Metal heterocyclic compounds for deposition of thin films | Julien Gatineau, Shingo Okubo | 2014-01-28 |
| 8613976 | Method of forming silicon oxide containing films | Christian Dussarrat, Ikuo Suzuki, Julien Gatineau, Eri Tsukada | 2013-12-24 |
| 8348248 | Bubbling supply system for stable precursor supply | Yoichi Sakata, Toshiyuki Nakagawa, Naoyuki Nakamoto | 2013-01-08 |
| 8227032 | Method of forming silicon oxide containing films | Christian Dussarrat, Julien Gatineau, Eri Tsukada, Ikuo Suzuki | 2012-07-24 |
| 8152582 | Method of manufacturing image displaying apparatus | Kazuhiro Nagasaka, Isamu Shigyo | 2012-04-10 |
| 8101237 | Tellurium precursors for film deposition | Shingo Okubo, Julien Gatineau | 2012-01-24 |
| 7579257 | Sample separating apparatus and method, and substrate manufacturing method | Kazuaki Ohmi, Kiyofumi Sakaguchi | 2009-08-25 |
| 7544389 | Precursor for film formation and method for forming ruthenium-containing film | Christian Dussarrat, Julien Gatineau | 2009-06-09 |
| 7351670 | Method for producing silicon nitride films and process for fabricating semiconductor devices using said method | Takeshi Hoshi, Tsuyoshi Saito, Takako Kimura, Christian Dussarrat | 2008-04-01 |
| 7017830 | Method and apparatus for separating sample | Kiyofumi Sakaguchi | 2006-03-28 |
| 6979629 | Method and apparatus for processing composite member | Kazuaki Ohmi, Kiyofumi Sakaguchi, Hirokazu Kurisu | 2005-12-27 |
| 6971432 | Sample processing system | Kazuaki Ohmi, Kiyofumi Sakaguchi | 2005-12-06 |
| 6946052 | Separating apparatus and processing method for plate member | Mitsuharu Kohda, Kiyofumi Sakaguchi, Akira Fujimoto | 2005-09-20 |
| 6946046 | Method and apparatus for separating member | Mitsuharu Kohda, Kiyofumi Sakaguchi, Akira Fujimoto | 2005-09-20 |
| 6900114 | Separating apparatus, separating method, and method of manufacturing semiconductor substrate | Kazuaki Ohmi, Takao Yonehara, Kiyofumi Sakaguchi, Hirokazu Kurisu | 2005-05-31 |
| 6867110 | Separating apparatus and processing method for plate member | Mitsuharu Kohda, Kiyofumi Sakaguchi, Akira Fujimoto | 2005-03-15 |
| 6860963 | Sample separating apparatus and method, and substrate manufacturing method | Takao Yonehara, Kazuaki Omi, Kiyofumi Sakaguchi | 2005-03-01 |