Issued Patents All Time
Showing 1–25 of 77 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368042 | Precursors and processes for deposition of Si-containing films using ALD at temperature of 550° C. or higher | Naoto NODA, Naohisa NAKAGAWA, Zhiwen Wan, Takio Kizu | 2025-07-22 |
| 12187853 | Silicon-based self-assembling monolayer compositions and surface preparation using the same | Venkateswara R. Pallem, Nicolas Blasco, Claudia Fafard, Fabrizio Marchegiani | 2025-01-07 |
| 12173403 | Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing films | Rocio Alejandra Arteaga Muller, Raphael ROCHAT, Antonio Sanchez, Nicolas Blasco, Santiago Marques-Gonzalez +3 more | 2024-12-24 |
| 11821080 | Reagents to remove oxygen from metal oxyhalide precursors in thin film deposition processes | Yumin Liu, Rocio Alejandra Arteaga Muller, Nicolas Blasco, Feng Li, Venkateswara R. Pallem +1 more | 2023-11-21 |
| 11820654 | Si-containing film forming precursors and methods of using the same | Peng Zhang, Antonio Sanchez, Manish Khandelwal, Gennadiy Itov, Reno Pesaresi +2 more | 2023-11-21 |
| 11806677 | Preprocessing method for solid material, and solid material product filled with solid material manufactured using said solid material preprocessing method | Kohei Tarutani, Nicolas Blasco, Stefan Wiese, Guillaume Husson | 2023-11-07 |
| 11739220 | Perhydropolysilazane compositions and methods for forming oxide films using same | Antonio Sanchez, Gennadiy Itov, Manish Khandelwal, Cole J. Ritter, III, Peng Zhang +9 more | 2023-08-29 |
| 11699584 | Si-containing film forming precursors and methods of using the same | Peng Zhang, Antonio Sanchez, Manish Khandelwal, Gennadiy Itov, Reno Pesaresi | 2023-07-11 |
| 11577967 | Tungsten pentachloride conditioning and crystalline phase manipulation | Feng Li, Sonia Plaza, Nicolas Blasco, Yumin Liu | 2023-02-14 |
| 11499014 | Cureable formulations for forming low-k dielectric silicon-containing films using polycarbosilazane | Yumin Liu, Peng Zhang, Fan QIN, Gennadiy Itov, Fabrizio Marchegiani +1 more | 2022-11-15 |
| 11482414 | Ultra-low temperature ALD to form high-quality Si-containing film | Naoto NODA, Ivan Oshchepkov | 2022-10-25 |
| 11407922 | Si-containing film forming compositions and methods of making and using the same | Manish Khandelwal, Sean Kerrigan, Antonio Sanchez, Peng Zhang, Yang Wang | 2022-08-09 |
| 11319449 | Area selective deposition of metal containing films | Wontae Noh, Jooho LEE | 2022-05-03 |
| 11261202 | Catalytic reduction of halogenated carbosilanes and halogenated carbodisilanes | Manish Khandelwal, Reno Pesaresi | 2022-03-01 |
| 11242597 | Lanthanide precursors and deposition of lanthanide-containing films using the same | Satoko Gatineau, Daehyeon Kim, Wontae Noh | 2022-02-08 |
| 11203528 | N—H free and Si-rich per-hydridopolysilzane compositions, their synthesis, and applications | Antonio Sanchez, Gennadiy Itov, Manish Khandelwal, Cole J. Ritter, III, Peng Zhang +8 more | 2021-12-21 |
| 11205573 | Ge-containing Co-film forming material, Ge-containing Co film and film forming method thereof | Rocio Alejandra Arteaga Muller, Nicolas Blasco, Changhee Ko, Antonio Sanchez, Raphael ROCHAT | 2021-12-21 |
| 11168099 | Titanium-containing film forming compositions for vapor deposition of titanium-containing films | Antonio Sanchez, Grigory Nikiforov, Nicolas Blasco | 2021-11-09 |
| 11124876 | Si-containing film forming precursors and methods of using the same | Peng Zhang, Antonio Sanchez, Manish Khandelwal, Gennadiy Itov, Reno Pesaresi +2 more | 2021-09-21 |
| 11066310 | Tungsten pentachloride conditioning and crystalline phase manipulation | Feng Li, Sonia Plaza, Nicolas Blasco, Yumin Liu | 2021-07-20 |
| 11021793 | Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing films | Rocio ARTEAGA, Raphael ROCHAT, Antonio Sanchez, Nicolas Blasco, Santiago Marques-Gonzalez +3 more | 2021-06-01 |
| 11008351 | Methods for vapor deposition of group 4 transition metal-containing films using Group 4 transition metal-containing films forming compositions | Ziyun Wang, Zhiwen Wan | 2021-05-18 |
| 10899630 | Tungsten pentachloride conditioning and crystalline phase manipulation | Feng Li, Sonia Plaza, Nicolas Blasco, Yumin Liu | 2021-01-26 |
| 10895012 | Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same | Satoko Gatineau, Wontae Noh, Daehyeon Kim, Julien Gatineau | 2021-01-19 |
| 10800661 | Preparation of Si-H containing iodosilanes via halide exchange reaction | Cole J. Ritter, III, Gennadiy Itov, Manish Khandelwal, Glenn Kuchenbeiser, Sean Kerrigan +3 more | 2020-10-13 |