Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11242597 | Lanthanide precursors and deposition of lanthanide-containing films using the same | Daehyeon Kim, Wontae Noh, Jean-Marc Girard | 2022-02-08 |
| 10895012 | Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same | Wontae Noh, Daehyeon Kim, Julien Gatineau, Jean-Marc Girard | 2021-01-19 |
| 10648087 | Etching reactants and plasma-free etching processes using the same | Clément Lansalot-Matras, Jooho LEE, Jean-Marc Girard, Nicolas Blasco | 2020-05-12 |
| 10465289 | Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same | Daehyeon Kim, Wontae Noh, Julien Gatineau, Jean-Marc Girard | 2019-11-05 |
| 10364259 | Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same | Daehyeon Kim, Wontae Noh, Julien Gatineau, Jean-Marc Girard | 2019-07-30 |
| 10337104 | Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same | Wontae Noh, Daehyeon Kim, Julien Gatineau, Jean-Marc Girard | 2019-07-02 |
| 10309010 | Cobalt-containing compounds, their synthesis, and use in cobalt-containing film deposition | Changhee Ko, Jean-Marc Girard, Julien Gatineau | 2019-06-04 |
| 10287175 | Method for purification and storage of Til4 for Ti-containing film deposition | Grigory Nikiforov | 2019-05-14 |
| 10011903 | Manganese-containing film forming compositions, their synthesis, and use in film deposition | Stefan Wiese, Jean-Marc Girard | 2018-07-03 |
| 9790247 | Cobalt-containing compounds, their synthesis, and use in cobalt-containing film deposition | Changhee Ko | 2017-10-17 |
| 9738971 | Vapor deposition methods to form group 8-containing films | Grigory Nikiforov | 2017-08-22 |
| 9719167 | Cobalt-containing film forming compositions, their synthesis, and use in film deposition | Mikiko Kimura, Christian Dussarrat, Jean-Marc Girard, Nicolas Blasco | 2017-08-01 |
| 9487860 | Method for forming cobalt containing films | Jean-Marc Girard, Nicolas Blasco, Mikiko Kimura | 2016-11-08 |
| 9187511 | Titanium-aluminum alloy deposition with titanium-tetrahydroaluminate bimetallic molecules | Julien Gatineau, Jean-Marc Girard, Changhee Ko | 2015-11-17 |
| 8853075 | Method for forming a titanium-containing layer on a substrate using an atomic layer deposition (ALD) process | Christian Dussarrat, Christophe Lachaud, Nicolas Blasco, Audrey Pinchart, Ziyun Wang +2 more | 2014-10-07 |
| 8357614 | Ruthenium-containing precursors for CVD and ALD | — | 2013-01-22 |
| 8092721 | Deposition of ternary oxide films containing ruthenium and alkali earth metals | Julien Gatineau, Christian Dussarrat | 2012-01-10 |