Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398275 | Group V element-containing film compositions and vapor deposition of Group V element-containing film | Jooho LEE | 2025-08-26 |
| 12371787 | Method of forming dielectric films, new precursors and their use in the semi-conductor manufacturing | Daehyeon Kim, Jooho LEE | 2025-07-29 |
| 12312677 | Step coverage using an inhibitor molecule for high aspect ratio structures | Jooho LEE | 2025-05-27 |
| 11784041 | Preparation of lanthanide-containing precursors and deposition of lanthanide-containing films | Daehyeon Kim, Junhyun Song, Venkateswara R. Pallem | 2023-10-10 |
| 11319449 | Area selective deposition of metal containing films | Jooho LEE, Jean-Marc Girard | 2022-05-03 |
| 11242597 | Lanthanide precursors and deposition of lanthanide-containing films using the same | Satoko Gatineau, Daehyeon Kim, Jean-Marc Girard | 2022-02-08 |
| 10895012 | Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same | Satoko Gatineau, Daehyeon Kim, Julien Gatineau, Jean-Marc Girard | 2021-01-19 |
| 10465289 | Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same | Satoko Gatineau, Daehyeon Kim, Julien Gatineau, Jean-Marc Girard | 2019-11-05 |
| 10364259 | Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same | Daehyeon Kim, Satoko Gatineau, Julien Gatineau, Jean-Marc Girard | 2019-07-30 |
| 10337104 | Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same | Satoko Gatineau, Daehyeon Kim, Julien Gatineau, Jean-Marc Girard | 2019-07-02 |
| 10174423 | Niobium-containing film forming compositions and vapor deposition of Niobium-containing films | Clément Lansalot-Matras, Jooho LEE | 2019-01-08 |
| 10106887 | Group 5 transition metal-containing compounds for vapor deposition of group 5 transition metal-containing films | Clément Lansalot-Matras, Jooho LEE | 2018-10-23 |
| 10023462 | Niobium-Nitride film forming compositions and vapor deposition of Niobium-Nitride films | Clément Lansalot-Matras, Julien Lieffrig, Jooho LEE | 2018-07-17 |
| 9786671 | Niobium-containing film forming compositions and vapor deposition of niobium-containing films | Clément Lansalot-Matras | 2017-10-10 |
| 9748249 | Tantalum-containing film forming compositions and vapor deposition of tantalum-containing films | Clément Lansalot-Matras | 2017-08-29 |
| 9711347 | Preparation of lanthanide-containing precursors and deposition of lanthanide-containing films | Venkateswara R. Pallem, Christian Dussarrat | 2017-07-18 |
| 9691770 | Vanadium-containing film forming compositions and vapor deposition of vanadium-containing films | Clément Lansalot-Matras | 2017-06-27 |
| 9691771 | Vanadium-containing film forming compositions and vapor deposition of vanadium-containing films | Clément Lansalot-Matras | 2017-06-27 |
| 9518075 | Group 5 cyclopentadienyl transition metal-containing precursors for deposition of group 5 transition metal-containing films | Clément Lansalot-Matras | 2016-12-13 |
| 9384963 | Preparation of cerium-containing precursor and deposition of cerium-containing films | Venkateswara R. Pallem, Christian Dussarrat | 2016-07-05 |
| 8809849 | Preparation of cerium-containing precursors and deposition of cerium-containing films | Venkateswara R. Pallem, Christian Dussarrat | 2014-08-19 |