Issued Patents All Time
Showing 25 most recent of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12404585 | Lithium precursors for deposition of lithium-containing layers, islets or clusters | Christian Dussarrat, Keishi YAMAMOTO, Sunao KAMIMURA | 2025-09-02 |
| 12304922 | Low pressure process for synthesis of Pt(PF3)4 involving a soluble intermediate and storage of obtained Pt(PF3)4 | Grigory Nikiforov | 2025-05-20 |
| 12187853 | Silicon-based self-assembling monolayer compositions and surface preparation using the same | Venkateswara R. Pallem, Jean-Marc Girard, Claudia Fafard, Fabrizio Marchegiani | 2025-01-07 |
| 12173403 | Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing films | Rocio Alejandra Arteaga Muller, Raphael ROCHAT, Antonio Sanchez, Jean-Marc Girard, Santiago Marques-Gonzalez +3 more | 2024-12-24 |
| 11821080 | Reagents to remove oxygen from metal oxyhalide precursors in thin film deposition processes | Yumin Liu, Rocio Alejandra Arteaga Muller, Jean-Marc Girard, Feng Li, Venkateswara R. Pallem +1 more | 2023-11-21 |
| 11806677 | Preprocessing method for solid material, and solid material product filled with solid material manufactured using said solid material preprocessing method | Kohei Tarutani, Jean-Marc Girard, Stefan Wiese, Guillaume Husson | 2023-11-07 |
| 11673904 | Low pressure process for synthesis of Pt(PF3)4 involving a soluble intermediate and storage of obtained Pt(PF3)4 | Grigory Nikiforov | 2023-06-13 |
| 11577967 | Tungsten pentachloride conditioning and crystalline phase manipulation | Feng Li, Sonia Plaza, Jean-Marc Girard, Yumin Liu | 2023-02-14 |
| 11205573 | Ge-containing Co-film forming material, Ge-containing Co film and film forming method thereof | Rocio Alejandra Arteaga Muller, Jean-Marc Girard, Changhee Ko, Antonio Sanchez, Raphael ROCHAT | 2021-12-21 |
| 11168099 | Titanium-containing film forming compositions for vapor deposition of titanium-containing films | Antonio Sanchez, Jean-Marc Girard, Grigory Nikiforov | 2021-11-09 |
| 11066310 | Tungsten pentachloride conditioning and crystalline phase manipulation | Feng Li, Sonia Plaza, Jean-Marc Girard, Yumin Liu | 2021-07-20 |
| 11021793 | Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing films | Rocio ARTEAGA, Raphael ROCHAT, Antonio Sanchez, Jean-Marc Girard, Santiago Marques-Gonzalez +3 more | 2021-06-01 |
| 10899630 | Tungsten pentachloride conditioning and crystalline phase manipulation | Feng Li, Sonia Plaza, Jean-Marc Girard, Yumin Liu | 2021-01-26 |
| 10800661 | Preparation of Si-H containing iodosilanes via halide exchange reaction | Cole J. Ritter, III, Gennadiy Itov, Manish Khandelwal, Jean-Marc Girard, Glenn Kuchenbeiser +3 more | 2020-10-13 |
| 10710896 | Tungsten pentachloride conditioning and crystalline phase manipulation | Feng Li, Sonia Plaza, Jean-Marc Girard, Yumin Liu | 2020-07-14 |
| 10689405 | Titanium-containing film forming compositions for vapor deposition of titanium-containing films | Antonio Sanchez, Jean-Marc Girard, Grigory Nikiforov | 2020-06-23 |
| 10648087 | Etching reactants and plasma-free etching processes using the same | Clément Lansalot-Matras, Jooho LEE, Jean-Marc Girard, Satoko Gatineau | 2020-05-12 |
| 10584039 | Titanium-containing film forming compositions for vapor deposition of titanium-containing films | Antonio Sanchez, Jean-Marc Girard, Grigory Nikiforov | 2020-03-10 |
| 10384944 | Preparation of Si—H containing iodosilanes via halide exchange reaction | Cole J. Ritter, III, Gennadiy Itov, Manish Khandelwal, Jean-Marc Girard, Glenn Kuchenbeiser +3 more | 2019-08-20 |
| 10217629 | Method of forming dielectric films, new precursors and their use in semiconductor manufacturing | Christian Dussarrat, Audrey Pinchart, Christophe Lachaud | 2019-02-26 |
| 10053775 | Methods of using amino(bromo)silane precursors for ALD/CVD silicon-containing film applications | Glenn Kuchenbeiser, Venkateswara R. Pallem, Jean-Marc Girard | 2018-08-21 |
| 9911590 | Methods of forming dielectric films, new precursors and their use in semiconductor manufacturing | Christian Dussarrat, Audrey Pinchart, Christophe Lachaud | 2018-03-06 |
| 9719167 | Cobalt-containing film forming compositions, their synthesis, and use in film deposition | Satoko Gatineau, Mikiko Kimura, Christian Dussarrat, Jean-Marc Girard | 2017-08-01 |
| 9583335 | Method of forming dielectric films, new precursors and their use in semiconductor manufacturing | Christian Dussarrat, Audrey Pinchart, Christophe Lachaud | 2017-02-28 |
| 9487860 | Method for forming cobalt containing films | Satoko Gatineau, Jean-Marc Girard, Mikiko Kimura | 2016-11-08 |