Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9085823 | Method of forming a tantalum-containing layer on a substrate | Anthony Correia-Anacleto, Audrey Pinchart, Andreas Zauner, Ziyun Wang | 2015-07-21 |
| 9040372 | Niobium and vanadium organometallic precursors for thin film deposition | Antony Correia-Anacleto, Audrey Pinchart, Andreas Zauner | 2015-05-26 |
| 8853075 | Method for forming a titanium-containing layer on a substrate using an atomic layer deposition (ALD) process | Satoko Gatineau, Christian Dussarrat, Christophe Lachaud, Audrey Pinchart, Ziyun Wang +2 more | 2014-10-07 |
| 8668957 | Method of forming dielectric films, new precursors and their use in semiconductor manufacturing | Christian Dussarrat, Audrey Pinchart, Christophe Lachaud | 2014-03-11 |
| 8470401 | Use of group V metal containing precursors for a process of depositing a metal containing film | Nicolas MERLE, Stéphane Danielle, Christian Dussarrat | 2013-06-25 |
| 8470402 | Method of depositing a metal-containing dielectric film | Christian Dussarrat, Audrey Pinchart, Christophe Lachaud | 2013-06-25 |
| 8460989 | Niobium and vanadium organometallic precursors for thin film deposition | Anthony Correia-Anacleto, Audrey Pinchart, Andreas Zauner | 2013-06-11 |
| 8399056 | Method of forming high-k dielectric films based on novel titanium, zirconium, and hafnium precursors and their use for semiconductor manufacturing | Christian Dussarrat | 2013-03-19 |
| 8367531 | Aluminum implant using new compounds | Vincent M. Omarjee, Christian Dussarrat, Jean-Marc Girard | 2013-02-05 |
| 8343860 | High C content molecules for C implant | Vincent M. Omarjee, Christian Dussarrat, Jean-Marc Girard | 2013-01-01 |