Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11679156 | Use of stable isotopes to prove authentication of manufacturing location | Tracey Jacksier, Mani C. Matthew, Anthony W. Reccek, Jr., Martin Vasarhelyi | 2023-06-20 |
| 11430663 | Iodine-containing compounds for etching semiconductor structures | Vijay Surla, Rahul Gupta, Hui SUN, Venkateswara R. Pallem, Nathan Stafford +2 more | 2022-08-30 |
| 11152223 | Fluorocarbon molecules for high aspect ratio oxide etch | Curtis Anderson, Rahul Gupta, Nathan Stafford, Christian Dussarrat | 2021-10-19 |
| 10720335 | Chemistries for TSV/MEMS/power device etching | Peng Shen, Christian Dussarrat, Curtis Anderson, Rahul Gupta, Nathan Stafford | 2020-07-21 |
| 10607850 | Iodine-containing compounds for etching semiconductor structures | Vijay Surla, Rahul Gupta, Hui SUN, Venkateswara R. Pallem, Nathan Stafford +2 more | 2020-03-31 |
| 10381240 | Fluorocarbon molecules for high aspect ratio oxide etch | Curtis Anderson, Rahul Gupta, Nathan Stafford, Christian Dussarrat | 2019-08-13 |
| 10103031 | Chemistries for TSV/MEMS/power device etching | Peng Shen, Christian Dussarrat, Curtis Anderson, Rahul Gupta, Nathan Stafford | 2018-10-16 |
| 9892932 | Chemistries for TSV/MEMS/power device etching | Peng Shen, Christian Dussarrat, Curtis Anderson, Rahul Gupta, Nathan Stafford | 2018-02-13 |
| 9514959 | Fluorocarbon molecules for high aspect ratio oxide etch | Curtis Anderson, Rahul Gupta, Nathan Stafford, Christian Dussarrat | 2016-12-06 |
| 9121093 | Bis-ketoiminate copper precursors for deposition of copper-containing films and methods thereof | Christian Dussarrat, Clément Lansalot-Matras, Andrey V. Korolev | 2015-09-01 |
| 9064694 | Nitridation of atomic layer deposited high-k dielectrics using trisilylamine | Steven P. Consiglio, Robert D. Clark, Christian Dussarrat, Venkat Pallem, Glenn Kuchenbeiser | 2015-06-23 |
| 9045509 | Hafnium- and zirconium-containing precursors and methods of using the same | Christian Dussarrat, Venkateswara R. Pallem | 2015-06-02 |
| 8852460 | Alkali earth metal precursors for depositing calcium and strontium containing films | Olivier Letessier, Christian Dussarrat, Benjamin J. Feist | 2014-10-07 |
| 8765220 | Methods of making and deposition methods using hafnium- or zirconium-containing compounds | Christian Dussarrat, Venkateswara R. Pallem | 2014-07-01 |
| 8367531 | Aluminum implant using new compounds | Christian Dussarrat, Jean-Marc Girard, Nicolas Blasco | 2013-02-05 |
| 8349738 | Metal precursors for deposition of metal-containing films | Clément Lansalot-Matras, Christian Dussarrat, Cheng-Fang Hsiao | 2013-01-08 |
| 8343860 | High C content molecules for C implant | Christian Dussarrat, Jean-Marc Girard, Nicolas Blasco | 2013-01-01 |
| 8076243 | Metal precursors for deposition of metal-containing films | Christian Dussarrat, Clément Lansalot-Matras, Cheng-Fang Hsiao | 2011-12-13 |