Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9064694 | Nitridation of atomic layer deposited high-k dielectrics using trisilylamine | Steven P. Consiglio, Robert D. Clark, Christian Dussarrat, Vincent M. Omarjee, Glenn Kuchenbeiser | 2015-06-23 |