Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11430663 | Iodine-containing compounds for etching semiconductor structures | Rahul Gupta, Hui SUN, Venkateswara R. Pallem, Nathan Stafford, Fabrizio Marchegiani +2 more | 2022-08-30 |
| 10607850 | Iodine-containing compounds for etching semiconductor structures | Rahul Gupta, Hui SUN, Venkateswara R. Pallem, Nathan Stafford, Fabrizio Marchegiani +2 more | 2020-03-31 |
| 10256109 | Nitrogen-containing compounds for etching semiconductor structures | Rahul Gupta, Venkateswara R. Pallem | 2019-04-09 |
| 10115600 | Method of etching semiconductor structures with etch gas | Rahul Gupta, Venkateswara R. Pallem, Curtis Anderson, Nathan Stafford | 2018-10-30 |
| 9773679 | Method of etching semiconductor structures with etch gas | Rahul Gupta, Venkateswara R. Pallem, Curtis Anderson, Nathan Stafford | 2017-09-26 |
| 9659788 | Nitrogen-containing compounds for etching semiconductor structures | Rahul Gupta, Venkateswara R. Pallem | 2017-05-23 |