Issued Patents All Time
Showing 26–50 of 77 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10710896 | Tungsten pentachloride conditioning and crystalline phase manipulation | Feng Li, Sonia Plaza, Nicolas Blasco, Yumin Liu | 2020-07-14 |
| 10689405 | Titanium-containing film forming compositions for vapor deposition of titanium-containing films | Antonio Sanchez, Grigory Nikiforov, Nicolas Blasco | 2020-06-23 |
| 10669160 | Heterogeneous wet synthesis process for preparation of high purity tungsten pentahalide | Yumin Liu, Feng Li, Zhiwen Wan, Claudia Fafard, Stefan Wiese +3 more | 2020-06-02 |
| 10648087 | Etching reactants and plasma-free etching processes using the same | Clément Lansalot-Matras, Jooho LEE, Nicolas Blasco, Satoko Gatineau | 2020-05-12 |
| 10647578 | N—H free and SI-rich per-hydridopolysilzane compositions, their synthesis, and applications | Antonio Sanchez, Gennadiy Itov, Manish Khandelwal, Cole J. Ritter, III, Peng Zhang +8 more | 2020-05-12 |
| 10584039 | Titanium-containing film forming compositions for vapor deposition of titanium-containing films | Antonio Sanchez, Grigory Nikiforov, Nicolas Blasco | 2020-03-10 |
| 10501484 | Amine substituted trisilylamine and tridisilylamine compounds and synthesis methods thereof | Antonio Sanchez, Gennadiy Itov, Manish Khandelwal, Matthew Damien Stephens, Peng Zhang | 2019-12-10 |
| 10465289 | Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same | Satoko Gatineau, Daehyeon Kim, Wontae Noh, Julien Gatineau | 2019-11-05 |
| 10403494 | Si-containing film forming precursors and methods of using the same | Peng Zhang, Antonio Sanchez, Manish Khandelwal, Gennadiy Itov, Reno Pesaresi | 2019-09-03 |
| 10384944 | Preparation of Si—H containing iodosilanes via halide exchange reaction | Cole J. Ritter, III, Gennadiy Itov, Manish Khandelwal, Glenn Kuchenbeiser, Sean Kerrigan +3 more | 2019-08-20 |
| 10364259 | Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same | Daehyeon Kim, Satoko Gatineau, Wontae Noh, Julien Gatineau | 2019-07-30 |
| 10337104 | Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same | Satoko Gatineau, Wontae Noh, Daehyeon Kim, Julien Gatineau | 2019-07-02 |
| 10309010 | Cobalt-containing compounds, their synthesis, and use in cobalt-containing film deposition | Satoko Gatineau, Changhee Ko, Julien Gatineau | 2019-06-04 |
| 10294110 | Pentachlorodisilane production method and pentachlorodisilane produced by same | Hiroyuki Yashima, Takahiro Kozuka, Seiichi Terasaki | 2019-05-21 |
| 10192734 | Short inorganic trisilylamine-based polysilazanes for thin film deposition | Antonio Sanchez, Gennadiy Itov, Reno Pesaresi, Peng Zhang, Manish Khandelwal | 2019-01-29 |
| 10106425 | Synthesis methods for halosilanes | Sean Kerrigan, Zhiwen Wan | 2018-10-23 |
| 10106568 | Hafnium-containing film forming compositions for vapor deposition of hafnium-containing films | Christian Dussarrat, Hana Ishii, Clément Lansalot-Matras, Julien Lieffrig | 2018-10-23 |
| 10053775 | Methods of using amino(bromo)silane precursors for ALD/CVD silicon-containing film applications | Glenn Kuchenbeiser, Venkateswara R. Pallem, Nicolas Blasco | 2018-08-21 |
| 10011903 | Manganese-containing film forming compositions, their synthesis, and use in film deposition | Stefan Wiese, Satoko Gatineau | 2018-07-03 |
| 9969756 | Carbosilane substituted amine precursors for deposition of Si-containing films and methods thereof | Claudia Fafard, Venkateswara R. Pallem | 2018-05-15 |
| 9920077 | Amine substituted trisilylamine and tridisilylamine compounds and synthesis methods thereof | Antonio Sanchez, Gennadiy Itov, Manish Khandelwal, Matthew Damien Stephens, Peng Zhang | 2018-03-20 |
| 9777025 | Si-containing film forming precursors and methods of using the same | Peng Zhang, Antonio Sanchez, Manish Khandelwal, Gennadiy Itov, Reno Pesaresi | 2017-10-03 |
| 9719167 | Cobalt-containing film forming compositions, their synthesis, and use in film deposition | Satoko Gatineau, Mikiko Kimura, Christian Dussarrat, Nicolas Blasco | 2017-08-01 |
| 9633838 | Vapor deposition of silicon-containing films using penta-substituted disilanes | Changhee Ko, Ivan Oshchepkov, Kazutaka Yanagita, Shingo Okubo, Naoto NODA +1 more | 2017-04-25 |
| 9487860 | Method for forming cobalt containing films | Satoko Gatineau, Nicolas Blasco, Mikiko Kimura | 2016-11-08 |