Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9633838 | Vapor deposition of silicon-containing films using penta-substituted disilanes | Jean-Marc Girard, Changhee Ko, Ivan Oshchepkov, Kazutaka Yanagita, Naoto NODA +1 more | 2017-04-25 |
| 9548198 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Norikazu Mizuno, Kazutaka Yanagita | 2017-01-17 |
| 9343290 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Norikazu Mizuno, Kazutaka Yanagita | 2016-05-17 |
| 9109281 | Metal heterocyclic compounds for deposition of thin films | Julien Gatineau, Kazutaka Yanagita | 2015-08-18 |
| 8636845 | Metal heterocyclic compounds for deposition of thin films | Julien Gatineau, Kazutaka Yanagita | 2014-01-28 |
| 8236381 | Metal piperidinate and metal pyridinate precursors for thin film deposition | — | 2012-08-07 |
| 8101237 | Tellurium precursors for film deposition | Kazutaka Yanagita, Julien Gatineau | 2012-01-24 |