Issued Patents All Time
Showing 1–25 of 148 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392031 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Yoshitomo HASHIMOTO, Kimihiko NAKATANI | 2025-08-19 |
| 12381091 | Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Kimihiko NAKATANI, Ryota Ueno, Motomu DEGAI, Takashi Nakagawa, Yoshitomo HASHIMOTO | 2025-08-05 |
| 12315719 | Substrate processing method, method of manufacturing semiconductor device, non-transitory computer-readable recording medium and substrate processing apparatus | — | 2025-05-27 |
| 12037677 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Ryuji Yamamoto | 2024-07-16 |
| 11978623 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Katsuyoshi Harada, Kimihiko NAKATANI, Masaya NAGATO, Takashi Ozaki +1 more | 2024-05-07 |
| 11848201 | Method of manufacturing semiconductor device, recording medium, and substrate processing method | Tsukasa Kamakura, Takaaki Noda | 2023-12-19 |
| 11699593 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Ryota Ueno, Motomu DEGAI, Takashi Nakagawa, Yoshitomo HASHIMOTO | 2023-07-11 |
| 11527402 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Yoshitomo HASHIMOTO, Katsuyoshi Harada, Kimihiko NAKATANI, Masaya NAGATO, Takashi Ozaki +1 more | 2022-12-13 |
| 11380540 | Substrate processing apparatus | Takashi Nakagawa, Naofumi Ohashi, Tadashi Takasaki | 2022-07-05 |
| 11251038 | Method of manufacturing semiconductor device, recording medium, and substrate processing method | Tsukasa Kamakura, Takaaki Noda | 2022-02-15 |
| 11251039 | Method of manufacturing semiconductor device, recording medium, and substrate processing method | Tsukasa Kamakura, Takaaki Noda | 2022-02-15 |
| 11043377 | Method of manufacturing semiconductor device | Naofumi Ohashi | 2021-06-22 |
| 11028473 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto | 2021-06-08 |
| 11027970 | Method of manufacturing semiconductor device | Naofumi Ohashi | 2021-06-08 |
| 10964531 | Method of manufacturing semiconductor device by supplying gas | Takashi Nakagawa, Naofumi Ohashi, Tadashi Takasaki | 2021-03-30 |
| 10755921 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Yoshitomo HASHIMOTO, Tatsuru Matsuoka | 2020-08-25 |
| 10607833 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Takashi Ozaki, Masato Terasaki, Risa YAMAKOSHI, Satoshi Shimamoto +1 more | 2020-03-31 |
| 10600642 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO | 2020-03-24 |
| 10497561 | Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium | Yoshinobu Nakamura, Kiyohiko Maeda, Ryota Horiike, Yoshitomo HASHIMOTO | 2019-12-03 |
| 10340134 | Semiconductor device manufacturing method, substrate processing apparatus, and recording medium | Atsushi Sano, Katsuyoshi Harada | 2019-07-02 |
| 10229829 | Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium | Yoshinobu Nakamura, Kiyohiko Maeda, Ryota Horiike, Yoshitomo HASHIMOTO | 2019-03-12 |
| 10199219 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Satoshi Shimamoto, Hajime Karasawa, Ryota Horiike, Naoharu Nakaiso, Yoshitomo HASHIMOTO | 2019-02-05 |
| 10163625 | Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium | Yoshinobu Nakamura, Kiyohiko Maeda, Ryota Horiike, Yoshitomo HASHIMOTO | 2018-12-25 |
| 10134586 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takafumi Nitta, Satoshi Shimamoto | 2018-11-20 |
| 10128104 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Sano | 2018-11-13 |