Issued Patents All Time
Showing 1–25 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094532 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Sano, Kimihiko NAKATANI, Tatsuru Matsuoka, Kenji Kameda | 2021-08-17 |
| 10910214 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Masanori NAKAYAMA, Masaya NAGATO, Tatsuru Matsuoka, Hiroki Tamashita +1 more | 2021-02-02 |
| 10720325 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Takafumi Nitta, Yushin Takasawa, Hiroki Yamashita | 2020-07-21 |
| 10607833 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Takashi Ozaki, Masato Terasaki, Risa YAMAKOSHI, Jiro Yugami +1 more | 2020-03-31 |
| 10604842 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Yushin Takasawa, Shin SONE | 2020-03-31 |
| 10490400 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada | 2019-11-26 |
| 10290492 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Yushin Takasawa, Hiroki HATTA | 2019-05-14 |
| 10199219 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Hajime Karasawa, Ryota Horiike, Naoharu Nakaiso, Yoshitomo HASHIMOTO | 2019-02-05 |
| 10163910 | Method of manufacturing semiconductor device | Atsushi Moriya | 2018-12-25 |
| 10134586 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takafumi Nitta, Yoshiro Hirose | 2018-11-20 |
| 10115583 | Method of manufacturing semiconductor device | Hiroshi Ashihara, Kazuyuki Toyoda, Naofumi Ohashi | 2018-10-30 |
| 10090322 | Method of manufacturing semiconductor device | Toshiyuki Kikuchi, Atsushi Moriya, Masanori NAKAYAMA, Takashi Nakagawa | 2018-10-02 |
| 10066298 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Yoshiro Hirose | 2018-09-04 |
| 10032629 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takafumi Nitta, Yoshiro Hirose | 2018-07-24 |
| 9991179 | Method of manufacturing semiconductor device | Naofumi Ohashi, Kazuyuki Toyoda, Toshiyuki Kikuchi | 2018-06-05 |
| 9978587 | Method of manufacturing semiconductor device including forming a film containing a first element, a second element and carbon, substrate processing apparatus, and recording medium | Yoshiro Hirose, Ryuji Yamamoto | 2018-05-22 |
| 9929005 | Method of manufacturing semiconductor device | Teruo Yoshino, Tadashi Terasaki, Masanori NAKAYAMA | 2018-03-27 |
| 9899211 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Kaori Kirikihira, Yugo Orihashi | 2018-02-20 |
| 9890458 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Yoshiro Hirose | 2018-02-13 |
| 9865458 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Yoshiro Hirose | 2018-01-09 |
| 9837261 | Method of manufacturing semiconductor device and substrate processing method | Yoshiro Hirose, Atsushi Sano, Yugo Orihashi, Yoshitomo HASHIMOTO | 2017-12-05 |
| 9831082 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Takaaki Noda, Takeo Hanashima, Yoshiro Hirose, Hiroshi Ashihara, Tsukasa Kamakura +1 more | 2017-11-28 |
| 9793107 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Shingo NOHARA, Yoshiro Hirose, Kiyohiko Maeda | 2017-10-17 |
| 9773661 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takafumi Nitta, Yoshiro Hirose | 2017-09-26 |
| 9741556 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Yoshiro Hirose | 2017-08-22 |