Issued Patents All Time
Showing 1–25 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424463 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing system, and recording medium | Kimihiko NAKATANI, Takayuki Waseda, Shoma Miyata | 2025-09-23 |
| 12424437 | Processing method, method of manufacturing semiconductor device, processing apparatus, and recording medium | Tomiyuki SHIMIZU, Masaya NAGATO, Takashi Ozaki, Katsuyoshi Harada | 2025-09-23 |
| 12406843 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium | Kazuhiro Harada, Masayoshi Minami, Shintaro Kogura, Shogo Otani | 2025-09-02 |
| 12400874 | Processing method, method of manufacturing semiconductor device, processing apparatus, and recording medium | Motomu DEGAI, Kimihiko NAKATANI, Takashi Nakagawa, Takayuki Waseda | 2025-08-26 |
| 12392031 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Yoshiro Hirose, Kimihiko NAKATANI | 2025-08-19 |
| 12381091 | Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Kimihiko NAKATANI, Ryota Ueno, Motomu DEGAI, Takashi Nakagawa, Yoshiro Hirose | 2025-08-05 |
| 12334336 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Katsuyoshi Harada | 2025-06-17 |
| 12334334 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Tomoki Fuji, Hiroki Yamashita | 2025-06-17 |
| 12288683 | Method of manufacturing semiconductor device, substrate processing method, non-transitory computer-readable recording medium and substrate processing apparatus | Yasunobu Koshi, Kazuyuki Okuda, Katsuyoshi Harada | 2025-04-29 |
| 12288684 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Tatsuru Matsuoka | 2025-04-29 |
| 12283478 | Processing method, method of manufacturing semiconductor device, processing apparatus, and recording medium | Kimihiko NAKATANI, Takayuki Waseda | 2025-04-22 |
| 12278103 | Method of processing substrate and method of manufacturing semiconductor device by forming film | Takayuki Waseda, Takashi Nakagawa, Kimihiko NAKATANI, Motomu DEGAI, Takao Izaki | 2025-04-15 |
| 12243753 | Method and apparatus for selective film formation in semiconductor substrate processing | Kimihiko NAKATANI | 2025-03-04 |
| 12094708 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Masaya NAGATO | 2024-09-17 |
| 12033852 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takayuki Waseda, Takashi Nakagawa, Kimihiko NAKATANI, Motomu DEGAI | 2024-07-09 |
| 12009201 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Tatsuru Matsuoka | 2024-06-11 |
| 11978623 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Kimihiko NAKATANI, Yoshiro Hirose, Masaya NAGATO, Takashi Ozaki +1 more | 2024-05-07 |
| 11967499 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tatsuru Matsuoka | 2024-04-23 |
| 11961733 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Tomiyuki SHIMIZU, Masaya NAGATO, Takashi Ozaki, Katsuyoshi Harada | 2024-04-16 |
| 11935742 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Takayuki Waseda | 2024-03-19 |
| 11894239 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Motomu DEGAI, Kimihiko NAKATANI, Takashi Nakagawa, Takayuki Waseda | 2024-02-06 |
| 11848203 | Methods of processing substrate and manufacturing semiconductor device by forming film, substrate processing apparatus, and recording medium | Takayuki Waseda, Takashi Nakagawa, Kimihiko NAKATANI, Motomu DEGAI, Takao Izaki | 2023-12-19 |
| 11823886 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium | Kazuhiro Harada, Masayoshi Minami, Shintaro Kogura, Shogo Otani | 2023-11-21 |
| 11817314 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Tatsuru Matsuoka | 2023-11-14 |
| 11728165 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Hiroki Yamashita | 2023-08-15 |