Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424463 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing system, and recording medium | Kimihiko NAKATANI, Takayuki Waseda, Yoshitomo HASHIMOTO | 2025-09-23 |
| 12374544 | Processing method, method of manufacturing semiconductor device, processing apparatus, and recording medium | Kimihiko NAKATANI, Takayuki Waseda, Takashi Nakagawa, Motomu DEGAI | 2025-07-29 |
| 11923191 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Takayuki Waseda, Takashi Nakagawa, Motomu DEGAI | 2024-03-05 |