Issued Patents All Time
Showing 1–25 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424463 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing system, and recording medium | Takayuki Waseda, Shoma Miyata, Yoshitomo HASHIMOTO | 2025-09-23 |
| 12400874 | Processing method, method of manufacturing semiconductor device, processing apparatus, and recording medium | Motomu DEGAI, Takashi Nakagawa, Takayuki Waseda, Yoshitomo HASHIMOTO | 2025-08-26 |
| 12392031 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Yoshitomo HASHIMOTO, Yoshiro Hirose | 2025-08-19 |
| 12381091 | Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Ryota Ueno, Motomu DEGAI, Takashi Nakagawa, Yoshitomo HASHIMOTO, Yoshiro Hirose | 2025-08-05 |
| 12374544 | Processing method, method of manufacturing semiconductor device, processing apparatus, and recording medium | Shoma Miyata, Takayuki Waseda, Takashi Nakagawa, Motomu DEGAI | 2025-07-29 |
| 12331393 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto | 2025-06-17 |
| 12281386 | Method of processing substrate for forming film containing silicon by supplying precursor containing Si—C bonds | — | 2025-04-22 |
| 12283478 | Processing method, method of manufacturing semiconductor device, processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Takayuki Waseda | 2025-04-22 |
| 12278103 | Method of processing substrate and method of manufacturing semiconductor device by forming film | Takayuki Waseda, Takashi Nakagawa, Motomu DEGAI, Takao Izaki, Yoshitomo HASHIMOTO | 2025-04-15 |
| 12255072 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Masato Kawanishi, Takumi Ito | 2025-03-18 |
| 12243753 | Method and apparatus for selective film formation in semiconductor substrate processing | Yoshitomo HASHIMOTO | 2025-03-04 |
| 12217959 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tsukasa Kamakura, Hajime Karasawa, Kazuhiro Harada | 2025-02-04 |
| 12176216 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Motomu DEGAI, Hiroshi Ashihara | 2024-12-24 |
| 12080550 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | — | 2024-09-03 |
| 12080546 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | — | 2024-09-03 |
| 12033852 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takayuki Waseda, Takashi Nakagawa, Motomu DEGAI, Yoshitomo HASHIMOTO | 2024-07-09 |
| 11978623 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Katsuyoshi Harada, Yoshiro Hirose, Masaya NAGATO, Takashi Ozaki +1 more | 2024-05-07 |
| 11935742 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Takayuki Waseda | 2024-03-19 |
| 11923193 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Motomu DEGAI | 2024-03-05 |
| 11923191 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium | Shoma Miyata, Takayuki Waseda, Takashi Nakagawa, Motomu DEGAI | 2024-03-05 |
| 11894239 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Motomu DEGAI, Takashi Nakagawa, Takayuki Waseda, Yoshitomo HASHIMOTO | 2024-02-06 |
| 11848203 | Methods of processing substrate and manufacturing semiconductor device by forming film, substrate processing apparatus, and recording medium | Takayuki Waseda, Takashi Nakagawa, Motomu DEGAI, Takao Izaki, Yoshitomo HASHIMOTO | 2023-12-19 |
| 11837466 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | — | 2023-12-05 |
| 11746416 | Method of processing substrate and manufacturing semiconductor device by forming film containing silicon | — | 2023-09-05 |
| 11705326 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Hiroshi Ashihara, Motomu DEGAI, Kenji Kameda | 2023-07-18 |