Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424437 | Processing method, method of manufacturing semiconductor device, processing apparatus, and recording medium | Tomiyuki SHIMIZU, Takashi Ozaki, Yoshitomo HASHIMOTO, Katsuyoshi Harada | 2025-09-23 |
| 12371782 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Masanori OKUNO, Tatsuya Yotsutani, Toshihiko Yonejima | 2025-07-29 |
| 12094708 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Yoshitomo HASHIMOTO | 2024-09-17 |
| 11978623 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Katsuyoshi Harada, Kimihiko NAKATANI, Yoshiro Hirose, Takashi Ozaki +1 more | 2024-05-07 |
| 11961733 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Tomiyuki SHIMIZU, Takashi Ozaki, Yoshitomo HASHIMOTO, Katsuyoshi Harada | 2024-04-16 |
| 11527402 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Yoshitomo HASHIMOTO, Katsuyoshi Harada, Kimihiko NAKATANI, Yoshiro Hirose, Takashi Ozaki +1 more | 2022-12-13 |
| 10968517 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Shin SONE, Kenji Kameda, Kotaro Konno | 2021-04-06 |
| 10910214 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Masanori NAKAYAMA, Tatsuru Matsuoka, Hiroki Tamashita, Takafumi Nitta +1 more | 2021-02-02 |
| 10586698 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Yoshitomo HASHIMOTO, Yushin Takasawa | 2020-03-10 |
| 10156012 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and a non-transitory computer-readable recording medium | Kenji Kameda, Akiou Kikuchi, Yuta Takeda, Kunihiro Yamauchi | 2018-12-18 |
| 10096463 | Method of manufacturing semiconductor device, substrate processing apparatus comprising exhaust port and multiple nozzles, and recording medium | Yoshitomo HASHIMOTO, Tatsuru Matsuoka, Ryota Horiike, Shintaro Kogura | 2018-10-09 |
| 9976214 | Cleaning method and method of manufacturing semiconductor device | Koei KURIBAYASHI, Kenji Kameda | 2018-05-22 |