Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148614 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Takuya JODA, Arito OGAWA, Norikazu Mizuno, Shogo HAYASAKA | 2024-11-19 |
| 12148621 | Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Arito OGAWA, Atsuro SEINO | 2024-11-19 |
| 12139787 | Apparatus and method for cleaning reaction vessel for processing substrate | Shinya Ebata, Takaaki Noda | 2024-11-12 |
| 12065736 | Cleaning method, method of manufacturing semiconductor device, and substrate processing apparatus | Naoya Miyashita, Tomoshi Taniyama | 2024-08-20 |
| 12053805 | Method of cleaning member in process container, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kenji Kameda, Tsukasa Kamakura, Takeo Hanashima, Hiroaki Hiramatsu, Shinya Ebata +5 more | 2024-08-06 |
| 11814725 | Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takeo Hanashima, Hiroyuki Miyagishi, Hiroto Yamagishi | 2023-11-14 |
| 11788188 | Cleaning method, method of manufacturing semiconductor device, and substrate processing apparatus | Naoya Miyashita, Tomoshi Taniyama | 2023-10-17 |
| 11753716 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Hiroki HATTA, Takeo Hanashima, Shin SONE | 2023-09-12 |
| 11621169 | Method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Arito OGAWA, Atsuro SEINO | 2023-04-04 |
| 10784116 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tsukasa Kamakura, Daigo YAMAGUCHI | 2020-09-22 |
| 9982347 | Cleaning method, method of manufacturing semiconductor device and substrate processing apparatus | Takatomo Yamaguchi, Takafumi Sasaki | 2018-05-29 |
| 9976214 | Cleaning method and method of manufacturing semiconductor device | Masaya NAGATO, Kenji Kameda | 2018-05-22 |
| 9508531 | Method of manufacturing semiconductor device by alternatively increasing and decreasing pressure of process chamber | Shinya Ebata | 2016-11-29 |
| 8889533 | Method of manufacturing semiconductor device, method of manufacturing substrate and substrate processing apparatus | Takafumi Sasaki, Yoshinori Imai, Sadao Nakashima | 2014-11-18 |
| 8450220 | Substrate processing apparatus , method of manufacturing semiconductor device, and method of manufacturing substrate | Takafumi Sasaki, Sadao Nakashima, Yoshinori Imai | 2013-05-28 |
| 8409352 | Method of manufacturing semiconductor device, method of manufacturing substrate and substrate processing apparatus | Yoshinori Imai, Sadao Nakashima, Takafumi Sasaki | 2013-04-02 |