Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400855 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kiyohisa ISHIBASHI | 2025-08-26 |
| 12351908 | Substrate processing method, recording medium, and substrate processing apparatus | Kazuhiro Harada | 2025-07-08 |
| 12065741 | Substrate processing apparatus and method of manufacturing semiconductor device | Mikio Ohno, Atsushi UMEKAWA, Hiroaki Hiramatsu | 2024-08-20 |
| 12053805 | Method of cleaning member in process container, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Koei KURIBAYASHI, Kenji Kameda, Tsukasa Kamakura, Hiroaki Hiramatsu, Shinya Ebata +5 more | 2024-08-06 |
| 12040179 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Kotaro Konno, Shingo NOHARA | 2024-07-16 |
| 11952664 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidenari Yoshida, Hiroaki Hiramatsu | 2024-04-09 |
| 11923188 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | — | 2024-03-05 |
| 11814725 | Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Koei KURIBAYASHI, Hiroyuki Miyagishi, Hiroto Yamagishi | 2023-11-14 |
| 11784044 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kiyohisa ISHIBASHI | 2023-10-10 |
| 11753716 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Hiroki HATTA, Koei KURIBAYASHI, Shin SONE | 2023-09-12 |
| 11542601 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidenari Yoshida, Hiroaki Hiramatsu | 2023-01-03 |
| 11387097 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Hiroto Yamagishi | 2022-07-12 |
| 11365482 | Substrate processing apparatus and method of manufacturing semiconductor device | Mikio Ohno, Atsushi UMEKAWA, Hiroaki Hiramatsu | 2022-06-21 |
| 10808318 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Tsukasa Kamakura, Takafumi Sasaki, Hidenari Yoshida | 2020-10-20 |
| 10640872 | Substrate processing apparatus and method of manufacturing semiconductor device | Mikio Ohno, Atsushi UMEKAWA, Hiroaki Hiramatsu | 2020-05-05 |
| 10388512 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takafumi Sasaki, Hiroaki Hiramatsu, Tsukasa Kamakura | 2019-08-20 |
| 10032626 | Method of manufacturing semiconductor device by forming a film on a substrate, substrate processing apparatus, and recording medium | Takaaki Noda, Shingo NOHARA, Kosuke Takagi, Mamoru Sueyoshi, Kotaro Konno +1 more | 2018-07-24 |
| 9831082 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Satoshi Shimamoto, Takaaki Noda, Yoshiro Hirose, Hiroshi Ashihara, Tsukasa Kamakura +1 more | 2017-11-28 |
| 9728400 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Hiroshi Ashihara | 2017-08-08 |
| 9673043 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and recording medium | Takaaki Noda, Shingo NOHARA, Satoshi Shimamoto, Hiroshi Ashihara, Yoshiro Hirose +1 more | 2017-06-06 |
| 9536734 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Hiroshi Ashihara | 2017-01-03 |
| 9530641 | Method for manufacturing semiconductor device, substrate processing apparatus, and recording medium | Jie Wang, Takaaki Noda | 2016-12-27 |
| 9514935 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and program | Takaaki Noda | 2016-12-06 |
| 9349586 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Satoshi Shimamoto, Takaaki Noda, Yoshiro Hirose, Hiroshi Ashihara, Tsukasa Kamakura +1 more | 2016-05-24 |
| 8507296 | Substrate processing method and film forming method | Masaaki Ueno, Masakazu Shimada, Haruo Morikawa, Akira Hayashida | 2013-08-13 |