Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10032626 | Method of manufacturing semiconductor device by forming a film on a substrate, substrate processing apparatus, and recording medium | Takaaki Noda, Shingo NOHARA, Kosuke Takagi, Takeo Hanashima, Kotaro Konno +1 more | 2018-07-24 |
| 7033937 | Apparatus and method for use in manufacturing a semiconductor device | Kazuyuki Toyoda, Osamu Kasahara, Tsutomu Tanaka, Nobuhito Shima, Masanori Sakai | 2006-04-25 |
| 6576063 | Apparatus and method for use in manufacturing a semiconductor device | Kazuyuki Toyoda, Osamu Kasahara, Tsutomu Tanaka, Nobuhito Shima, Masanori Sakai | 2003-06-10 |
| 6217663 | Substrate processing apparatus and substrate processing method | Yasuhiro Inokuchi, Fumihide Ikeda, Michiko Nishiwaki, Masatoshi Takada | 2001-04-17 |