Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6541344 | Substrate processing apparatus and semiconductor device manufacturing method | Katsuhisa Kasanami, Eisuke Nishitani, Satoshi Okada | 2003-04-01 |
| 6483989 | Substrate processing apparatus and semiconductor device producing method | Satoshi Okada, Katsuhisa Kasanami, Eisuke Nishitani | 2002-11-19 |
| 6217663 | Substrate processing apparatus and substrate processing method | Yasuhiro Inokuchi, Fumihide Ikeda, Masatoshi Takada, Mamoru Sueyoshi | 2001-04-17 |