Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8906161 | Semiconductor producing device and semiconductor device producing method | Toshimitsu Miyata, Mitsunori Ishisaka | 2014-12-09 |
| 7842160 | Semiconductor producing device and semiconductor device producing method | Toshimitsu Miyata, Mitsunori Ishisaka | 2010-11-30 |
| 6541344 | Substrate processing apparatus and semiconductor device manufacturing method | Eisuke Nishitani, Michiko Nishiwaki, Satoshi Okada | 2003-04-01 |
| 6483989 | Substrate processing apparatus and semiconductor device producing method | Satoshi Okada, Michiko Nishiwaki, Eisuke Nishitani | 2002-11-19 |
| 6472639 | Heat treatment method and heat treatment apparatus | Eisuke Nishitani, Naoko Matsuyama, Shinya Sasaki | 2002-10-29 |
| 6414280 | Heat treatment method and heat treatment apparatus | Eisuke Nishitani, Naoko Matsuyama, Shinya Sasaki | 2002-07-02 |