Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11685992 | Substrate processing apparatus, quartz reaction tube and method of manufacturing semiconductor device | Yusaku OKAJIMA, Takafumi Sasaki, Hidenari Yoshida, Shuhei Saido, Hidetoshi Mimura | 2023-06-27 |
| 10604839 | Substrate processing apparatus, method of manufacturing semiconductor device, and method of processing substrate | Tetsuaki INADA, Yuichi Wada, Mitsuhiro Hirano, Sadayoshi Horii, Hideharu Itatani +2 more | 2020-03-31 |
| 9142435 | Substrate stage of substrate processing apparatus and substrate processing apparatus | — | 2015-09-22 |
| 8906161 | Semiconductor producing device and semiconductor device producing method | Katsuhisa Kasanami, Toshimitsu Miyata | 2014-12-09 |
| 8197638 | Semiconductor manufacturing device and method for manufacturing semiconductor devices | Toshimitsu Miyata | 2012-06-12 |
| 7842160 | Semiconductor producing device and semiconductor device producing method | Katsuhisa Kasanami, Toshimitsu Miyata | 2010-11-30 |