Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12224185 | Method of manufacturing semiconductor device | Toshiyuki Kikuchi, Naofumi Ohashi | 2025-02-11 |
| 11728183 | Method of manufacturing semiconductor device | Toshiyuki Kikuchi, Naofumi Ohashi | 2023-08-15 |
| 11322370 | Method of manufacturing semiconductor device | Toshiyuki Kikuchi, Naofumi Ohashi | 2022-05-03 |
| 10714316 | Method of manufacturing semiconductor device | Tsukasa Kamakura, Kazuhiro Morimitsu, Eisuke Nishitani, Shun MATSUI | 2020-07-14 |
| 10604839 | Substrate processing apparatus, method of manufacturing semiconductor device, and method of processing substrate | Tetsuaki INADA, Yuichi Wada, Mitsunori Ishisaka, Mitsuhiro Hirano, Sadayoshi Horii +2 more | 2020-03-31 |
| 10388530 | Method of manufacturing semiconductor device and substrate processing apparatus | Arito OGAWA, Kazuhiro Harada, Yukinao KAGA, Hiroshi Ashihara | 2019-08-20 |
| 10340237 | Method of manufacturing semiconductor device | Naofumi Ohashi, Toshiyuki Kikuchi | 2019-07-02 |
| 9786493 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tatsushi UEDA, Junichi Tanabe, Katsuhiko Yamamoto, Yuki TAIRA, Naofumi Ohashi | 2017-10-10 |
| 9653301 | Semiconductor device having electrode made of high work function material, method and apparatus for manufacturing the same | Sadayoshi Horii, Arito OGAWA | 2017-05-16 |
| 9523150 | Substrate processing apparatus, method for manufacturing semiconductor device and computer-readable recording medium | — | 2016-12-20 |
| 9472637 | Semiconductor device having electrode made of high work function material and method of manufacturing the same | Sadayoshi Horii, Arito OGAWA | 2016-10-18 |
| 9437704 | Semiconductor device having electrode made of high work function material, method and apparatus for manufacturing the same | Sadayoshi Horii, Arito OGAWA | 2016-09-06 |
| 9218993 | Method of manufacturing semiconductor device and method of processing substrate | Kazuhiro Harada | 2015-12-22 |
| 8741731 | Method of manufacturing a semiconductor device | Yuji Takebayashi, Hirohisa Yamazaki, Sadayoshi Horii, Arito OGAWA | 2014-06-03 |
| 8728935 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus | Kazuhiro Harada, Sadayoshi Horii | 2014-05-20 |
| 8435905 | Manufacturing method of semiconductor device, and substrate processing apparatus | Sadayoshi Horii, Kazuhiro Harada | 2013-05-07 |
| 8420552 | Method of manufacturing a semiconductor device | Yuji Takebayashi, Hirohisa Yamazaki, Sadayoshi Horii, Arito OGAWA | 2013-04-16 |
| 8404603 | Method of manufacturing semiconductor device and substrate processing system | Arito OGAWA, Sadayoshi Horii, Taketoshi Sato, Nobuyuki Mise, Osamu Tonomura | 2013-03-26 |
| 8367566 | Method for manufacturing semiconductor device and method for processing substrate | Atsushi Sano, Mitsuro Tanabe | 2013-02-05 |
| 8235001 | Substrate processing apparatus and method for manufacturing semiconductor device | Atsushi Sano, Mitsuro Tanabe | 2012-08-07 |
| 7968437 | Semiconductor device manufacturing method and substrate processing apparatus | Sadayoshi Horii | 2011-06-28 |
| 7723245 | Method for manufacturing semiconductor device, and substrate processing apparatus | Atsushi Sano, Sadayoshi Horii, Katsuhiko Yamamoto | 2010-05-25 |
| 7709276 | Manufacturing method of a semiconductor device and substrate processing apparatus | Kazuhiro Harada | 2010-05-04 |
| 7648578 | Substrate processing apparatus, and method for manufacturing semiconductor device | Sadayoshi Horii, Hidehiro Yanai | 2010-01-19 |
| 7579276 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidehiro Yanai, Sadayoshi Horii, Atsushi Sano | 2009-08-25 |