Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10978361 | Substrate processing apparatus and recording medium | Takafumi Sasaki, Naofumi Ohashi, Tadashi Takasaki, Shun MATSUI | 2021-04-13 |
| 10714316 | Method of manufacturing semiconductor device | Tsukasa Kamakura, Hideharu Itatani, Eisuke Nishitani, Shun MATSUI | 2020-07-14 |
| 10424520 | Method of manufacturing semiconductor device | Takafumi Sasaki, Naofumi Ohashi, Tadashi Takasaki, Shun MATSUI | 2019-09-24 |
| 9502236 | Substrate processing apparatus, non-transitory computer-readable recording medium and method of manufacturing semiconductor device | Yukitomo HIROCHI, Kazuyuki Toyoda, Taketoshi Sato, Tetsuo Yamamoto | 2016-11-22 |
| 9487863 | Substrate processing apparatus | Shun MATSUI, Kazuyuki Toyoda | 2016-11-08 |
| 9412582 | Reaction tube, substrate processing apparatus, and method of manufacturing semiconductor device | Takafumi Sasaki, Eisuke Nishitani, Tetsuo Yamamoto, Masanao Fukuda | 2016-08-09 |
| 9163309 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Tetsuo Yamamoto, Kazuyuki Toyoda, Kenji Ono, Tadashi Takasaki, Ikuo Hirose +1 more | 2015-10-20 |
| 9084298 | Substrate processing apparatus including shielding unit for suppressing leakage of magnetic field | Yukitomo HIROCHI, Akinori Tanaka, Akihiro Sato, Takeshi Itoh, Daisuke Hara +2 more | 2015-07-14 |
| 9074284 | Heat treatment apparatus | Masanao Fukuda, Kenji Shirako, Akihiro Sato, Sadao Nakashima | 2015-07-07 |
| 9070554 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuyuki Toyoda, Yukitomo HIROCHI, Tetsuo Yamamoto, Tadashi Takasaki | 2015-06-30 |
| 9064695 | Substrate processing apparatus, non-transitory computer-readable recording medium and method of manufacturing semiconductor device | Yukitomo HIROCHI, Kazuyuki Toyoda, Taketoshi Sato, Tetsuo Yamamoto | 2015-06-23 |
| 7455734 | Substrate processing apparatus, substrate holder, and manufacturing method of semiconductor device | Takatomo Yamaguchi | 2008-11-25 |
| 7198447 | Semiconductor device producing apparatus and producing method of semiconductor device | Tatsuhisa Matsunaga, Masanori Kaneko, Kouichi Noto, Hidehiro Yanagawa, Masaki Matsushima | 2007-04-03 |
| 6737613 | Heat treatment apparatus and method for processing substrates | Takatomo Yamaguchi, Tatsuhisa Matsunaga | 2004-05-18 |