Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1070797 | Furnace for substrate processing apparatus | Hideto Tateno, Daiki Kimoto | 2025-04-15 |
| D1053156 | Furnace for substrate processing apparatus | Hideto Tateno, Daiki Kimoto | 2024-12-03 |
| 12053805 | Method of cleaning member in process container, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Koei KURIBAYASHI, Kenji Kameda, Tsukasa Kamakura, Takeo Hanashima, Hiroaki Hiramatsu +5 more | 2024-08-06 |
| 11990359 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Hidenari Yoshida, Kenji Ono | 2024-05-21 |
| 11495477 | Substrate processing apparatus | Shuhei Saido, Hidenari Yoshida, Takayuki Nakada, Tomoshi Taniyama | 2022-11-08 |
| D962183 | Retainer plate of top heater for wafer processing furnace | Shinobu Sugiura, Tetsuya Kosugi | 2022-08-30 |
| D962184 | Retainer plate of top heater for wafer processing furnace | Shinobu Sugiura, Tetsuya Kosugi | 2022-08-30 |
| 11359285 | Substrate processing apparatus, heater and method of manufacturing semiconductor device | Hitoshi Murata, Takashi Yahata, Yuichi Wada, Shuhei Saido | 2022-06-14 |
| 11222796 | Substrate processing apparatus | Shuhei Saido, Hidenari Yoshida, Takayuki Nakada, Tomoshi Taniyama | 2022-01-11 |
| D918848 | Retainer of ceiling heater for semiconductor fabrication apparatus | Shinobu Sugiura, Tetsuya Kosugi | 2021-05-11 |
| 10615061 | Substrate processing apparatus | Shuhei Saido, Hidenari Yoshida, Takayuki Nakada, Tomoshi Taniyama | 2020-04-07 |
| 10597780 | Substrate processing apparatus, heater and method of manufacturing semiconductor device | Hitoshi Murata, Takashi Yahata, Yuichi Wada, Shuhei Saido | 2020-03-24 |
| D826185 | Ceiling heater for substrate processing apparatus | Tetsuya Kosugi, Shuhei Saido | 2018-08-21 |
| D825502 | Heater for substrate processing apparatus | Tetsuya Kosugi, Shuhei Saido | 2018-08-14 |
| D825501 | Air flow controller for heater of substrate processing apparatus | Tetsuya Kosugi, Shuhei Saido | 2018-08-14 |
| D822081 | Rotary tool for boat of semiconductor manufacturing apparatus | Takashi Nogami | 2018-07-03 |
| D818960 | Insulation unit of semiconductor manufacturing apparatus | — | 2018-05-29 |
| D818961 | Insulation unit cover of semiconductor manufacturing apparatus | — | 2018-05-29 |
| 9982347 | Cleaning method, method of manufacturing semiconductor device and substrate processing apparatus | Takafumi Sasaki, Koei KURIBAYASHI | 2018-05-29 |
| D803908 | Rotary tool for boat of semiconductor manufacturing apparatus | Takashi Nogami | 2017-11-28 |
| D795209 | Heater for semiconductor thermal process | Hitoshi Murata, Yuichi Wada, Takashi Yahata, Shuhei Saido | 2017-08-22 |
| D793974 | Heater for semiconductor thermal process | Hitoshi Murata | 2017-08-08 |
| 9530677 | Substrate processing apparatus and semiconductor device manufacturing method | Akinori Tanaka, Daisuke Hara | 2016-12-27 |
| 9502237 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Shuhei Saido | 2016-11-22 |
| 9222732 | Substrate processing apparatus and method of manufacturing semiconductor device | Kenji Shirako, Shuhei Saido, Akihiro Sato | 2015-12-29 |