Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12365987 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Shinya Ebata | 2025-07-22 |
| 12065741 | Substrate processing apparatus and method of manufacturing semiconductor device | Mikio Ohno, Atsushi UMEKAWA, Takeo Hanashima | 2024-08-20 |
| 12053805 | Method of cleaning member in process container, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Koei KURIBAYASHI, Kenji Kameda, Tsukasa Kamakura, Takeo Hanashima, Shinya Ebata +5 more | 2024-08-06 |
| 11967501 | Substrate processing apparatus and method of manufacturing semiconductor device | Shuhei Saido, Takuro USHIDA | 2024-04-23 |
| 11952664 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidenari Yoshida, Takeo Hanashima | 2024-04-09 |
| 11591694 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium | Shinya Ebata | 2023-02-28 |
| 11542601 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidenari Yoshida, Takeo Hanashima | 2023-01-03 |
| 11476113 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryota Kataoka, Kiyohisa ISHIBASHI | 2022-10-18 |
| 11365482 | Substrate processing apparatus and method of manufacturing semiconductor device | Mikio Ohno, Atsushi UMEKAWA, Takeo Hanashima | 2022-06-21 |
| 11261528 | Substrate processing apparatus and method of manufacturing semiconductor device | Shuhei Saido, Takuro USHIDA | 2022-03-01 |
| 11170995 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Shinya Ebata | 2021-11-09 |
| 11047048 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masahito Kitamura, Tetsuya Takahashi | 2021-06-29 |
| 10907253 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Shinya Ebata | 2021-02-02 |
| D889596 | Gas nozzle for substrate processing apparatus | Yusaku OKAJIMA, Toru Kagaya, Shinya Ebata | 2020-07-07 |
| D888196 | Gas nozzle for substrate processing apparatus | Yusaku OKAJIMA, Toru Kagaya, Shinya Ebata | 2020-06-23 |
| 10640872 | Substrate processing apparatus and method of manufacturing semiconductor device | Mikio Ohno, Atsushi UMEKAWA, Takeo Hanashima | 2020-05-05 |
| 10584419 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masahito Kitamura, Tetsuya Takahashi | 2020-03-10 |
| 10388512 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takeo Hanashima, Takafumi Sasaki, Tsukasa Kamakura | 2019-08-20 |
| D853979 | Reaction tube | Toru Kagaya, Shinya Ebata, Yusaku OKAJIMA | 2019-07-16 |
| 9587314 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Taketoshi Sato, Yukitomo HIROCHI | 2017-03-07 |
| 9027728 | Segment type friction material | Yoshihito Fujimaki | 2015-05-12 |
| 9028614 | Substrate processing apparatus | Daisuke Hara, Takeshi Itoh, Masanao Fukuda, Takatomo Yamaguchi, Shuhei Saido +1 more | 2015-05-12 |
| 6798222 | Migration measuring method and measuring apparatus | Hirokazu Tanaka, Sachio Yoshihara, Takashi Shirakashi, Kazuhiro Kumekawa, Fumitaka Ueta | 2004-09-28 |