Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11967501 | Substrate processing apparatus and method of manufacturing semiconductor device | Hiroaki Hiramatsu, Shuhei Saido | 2024-04-23 |
| 11261528 | Substrate processing apparatus and method of manufacturing semiconductor device | Hiroaki Hiramatsu, Shuhei Saido | 2022-03-01 |
| 9953830 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Tsukasa Kamakura, Yoshiro Hirose, Kimihiko NAKATANI | 2018-04-24 |
| 9916976 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tsukasa Kamakura, Hiroshi Ashihara, Kimihiko NAKATANI | 2018-03-13 |