Issued Patents All Time
Showing 1–25 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12421387 | Polyester film and method for producing same | Takayoshi Okuzu, Ken Akamatsu, Akiko Hamamoto, Goro Araki, Akito Kajita | 2025-09-23 |
| 12387962 | Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording medium | Yuji Takebayashi | 2025-08-12 |
| 12283476 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Motomu DEGAI, Takayuki Waseda | 2025-04-22 |
| 12198929 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Toshiyuki Kikuchi | 2025-01-14 |
| 12176216 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Motomu DEGAI, Kimihiko NAKATANI | 2024-12-24 |
| 11996311 | Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording medium | Yuji Takebayashi | 2024-05-28 |
| 11854799 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Toshiyuki Kikuchi | 2023-12-26 |
| 11705326 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Motomu DEGAI, Kenji Kameda | 2023-07-18 |
| 11562905 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Motomu DEGAI | 2023-01-24 |
| 11170996 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Toshiyuki Kikuchi | 2021-11-09 |
| 11152215 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Motomu DEGAI, Kimihiko NAKATANI | 2021-10-19 |
| 10720324 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Hajime Karasawa, Kazuhiro Harada | 2020-07-21 |
| 10388762 | Method of manufacturing semiconductor device | Masahito Kitamura | 2019-08-20 |
| 10388530 | Method of manufacturing semiconductor device and substrate processing apparatus | Arito OGAWA, Kazuhiro Harada, Yukinao KAGA, Hideharu Itatani | 2019-08-20 |
| 10361084 | Method of manufacturing semiconductor device, substrate processing apparatus, recording medium, and supply system | Kazuhiro Harada, Kimihiko NAKATANI | 2019-07-23 |
| 10297440 | Method of manufacturing semiconductor device | Hirohisa Yamazaki, Noriyuki Isobe | 2019-05-21 |
| 10128128 | Method of manufacturing semiconductor device having air gap between wirings for low dielectric constant | Tsuyoshi Takeda, Naofumi Ohashi, Toshiyuki Kikuchi | 2018-11-13 |
| 10115583 | Method of manufacturing semiconductor device | Satoshi Shimamoto, Kazuyuki Toyoda, Naofumi Ohashi | 2018-10-30 |
| 9916976 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takuro USHIDA, Tsukasa Kamakura, Kimihiko NAKATANI | 2018-03-13 |
| 9831082 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Satoshi Shimamoto, Takaaki Noda, Takeo Hanashima, Yoshiro Hirose, Tsukasa Kamakura +1 more | 2017-11-28 |
| 9831083 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Daigo YAMAGUCHI, Tsukasa Kamakura, Tsuyoshi Takeda, Taketoshi Sato | 2017-11-28 |
| 9824883 | Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Arito OGAWA | 2017-11-21 |
| 9816183 | Substrate processing apparatus | Motoshi Sawada | 2017-11-14 |
| 9816182 | Substrate processing apparatus, method for manufacturing semiconductor device, and recording medium | Hideto Tateno, Yuichi Wada, Keishin Yamazaki, Takurou Ushida, Iwao Nakamura +1 more | 2017-11-14 |
| 9812355 | Method of manufacturing semiconductor device | Kimihiko NAKATANI | 2017-11-07 |