Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10784116 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tsukasa Kamakura, Koei KURIBAYASHI | 2020-09-22 |
| 9831083 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Tsukasa Kamakura, Hiroshi Ashihara, Tsuyoshi Takeda, Taketoshi Sato | 2017-11-28 |
| 9111748 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer readable recording medium | Tsuyoshi Takeda, Taketoshi Sato, Hidenari Yoshida | 2015-08-18 |