Issued Patents All Time
Showing 1–25 of 65 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400840 | Substrate processing apparatus, substrate holder, and method of manufacturing semiconductor device | Daisuke Hara | 2025-08-26 |
| 12094735 | Substrate processing apparatus, plurality of electrodes and method of manufacturing semiconductor device | Daisuke Hara | 2024-09-17 |
| 12068136 | Substrate processing apparatus, method of manufacturing semiconductor device, and plasma generator | — | 2024-08-20 |
| 11967490 | Plasma generating device, substrate processing apparatus, and method of manufacturing semiconductor device | Akihiro Sato, Yukitomo HIROCHI | 2024-04-23 |
| 11961715 | Substrate processing apparatus, substrate retainer and method of manufacturing semiconductor device | Daisuke Hara, Takashi Yahata, Kenji Ono, Kazuhiko Yamazaki | 2024-04-16 |
| 11804365 | Substrate processing apparatus, plasma generating apparatus, and method of manufacturing semiconductor device | Daisuke Hara | 2023-10-31 |
| 11749510 | Plasma generating device, substrate processing apparatus, and method of manufacturing semiconductor device | Akihiro Sato, Yukitomo HIROCHI | 2023-09-05 |
| 11629408 | Plasma generation device, substrate processing apparatus, and method of manufacturing semiconductor device | — | 2023-04-18 |
| 11469083 | Plasma generating device, substrate processing apparatus, and method of manufacturing semiconductor device | Akihiro Sato, Yukitomo HIROCHI | 2022-10-11 |
| 11469081 | Plasma generating device, substrate processing apparatus, and method of manufacturing semiconductor device | Akihiro Sato, Yukitomo HIROCHI | 2022-10-11 |
| 11380563 | Substrate processing apparatus, plurality of electrodes and method of manufacturing semiconductor device | Daisuke Hara | 2022-07-05 |
| 11295959 | Method of determining plasma abnormality, method of manufacturing semiconductor device, and substrate processing apparatus | Tatsuya NISHINO | 2022-04-05 |
| 11185939 | Wire electric discharge machining apparatus | Masashi Sakaguchi, Tsubasa Kuragaya | 2021-11-30 |
| 11072859 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | — | 2021-07-27 |
| 11037823 | Method of manufacturing semiconductor device | Naofumi Ohashi, Toshiyuki Kikuchi | 2021-06-15 |
| 10896810 | RF generating apparatus and plasma treatment apparatus | Yoshiyuki Oshida, Naoya Fujimoto, Norikazu Kato, Takeshi Okada | 2021-01-19 |
| 10796934 | Substrate processing apparatus, method of manufacturing semiconductor device and electrode fixing part | Tatsuya NISHINO, Takashi Yahata | 2020-10-06 |
| 10774421 | Semiconductor device manufacturing method, substrate processing apparatus and recording medium | — | 2020-09-15 |
| 10679831 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | — | 2020-06-09 |
| 10559837 | Fluid control valve | Takatada Usami, Ichiro Okawara | 2020-02-11 |
| 10494506 | Flame-retardant resin composition and article molded from same | Katsuhiro Yamanaka | 2019-12-03 |
| 10363521 | Filter device, control valve comprising the filter device, and fuel cell system | Kazuhiko Osawa, Daisaku Inamura, Ichiro Okawara, Takatada Usami, Shinichiro Takemoto | 2019-07-30 |
| 10294351 | Flameproofing agent for fibers | Katsuhiro Yamanaka, Kuniaki Kondo, Masaki Haruyoshi | 2019-05-21 |
| D835677 | Molded coil for centrifugal pump unit | Taiki Nakagawa, Shohei Ozeki | 2018-12-11 |
| 10153132 | Substrate processing apparatus | — | 2018-12-11 |