Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12255069 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Takashi Nogami, Norichika Yamagishi, Yoshihiko YANAGISAWA | 2025-03-18 |
| 11967490 | Plasma generating device, substrate processing apparatus, and method of manufacturing semiconductor device | Akihiro Sato, Tsuyoshi Takeda | 2024-04-23 |
| 11749510 | Plasma generating device, substrate processing apparatus, and method of manufacturing semiconductor device | Akihiro Sato, Tsuyoshi Takeda | 2023-09-05 |
| 11553565 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | — | 2023-01-10 |
| 11469081 | Plasma generating device, substrate processing apparatus, and method of manufacturing semiconductor device | Akihiro Sato, Tsuyoshi Takeda | 2022-10-11 |
| 11469083 | Plasma generating device, substrate processing apparatus, and method of manufacturing semiconductor device | Akihiro Sato, Tsuyoshi Takeda | 2022-10-11 |
| 11309195 | Heating element, substrate processing apparatus and method of manufacturing semiconductor device | Yoshihiko YANAGISAWA | 2022-04-19 |
| 11264253 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Shinya Sasaki, Noriaki MICHITA | 2022-03-01 |
| 11265977 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Yoshihiko YANAGISAWA | 2022-03-01 |
| 11239098 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | — | 2022-02-01 |
| 11177143 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Takashi Nogami, Yoshihiko YANAGISAWA | 2021-11-16 |
| 11018033 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Kazuhiro Yuasa, Tetsuo Yamamoto, Yoshihiko YANAGISAWA, Shinya Sasaki, Noriaki MICHITA | 2021-05-25 |
| 10633739 | Substrate processing apparatus | Takashi Yahata | 2020-04-28 |
| 10475652 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Hideto Yamaguchi | 2019-11-12 |
| 10131990 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | — | 2018-11-20 |
| 9587314 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Taketoshi Sato, Hiroaki Hiramatsu | 2017-03-07 |
| 9502236 | Substrate processing apparatus, non-transitory computer-readable recording medium and method of manufacturing semiconductor device | Kazuyuki Toyoda, Kazuhiro Morimitsu, Taketoshi Sato, Tetsuo Yamamoto | 2016-11-22 |
| 9084298 | Substrate processing apparatus including shielding unit for suppressing leakage of magnetic field | Akinori Tanaka, Akihiro Sato, Takeshi Itoh, Daisuke Hara, Kenji Shirako +2 more | 2015-07-14 |
| 9070554 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuyuki Toyoda, Tetsuo Yamamoto, Kazuhiro Morimitsu, Tadashi Takasaki | 2015-06-30 |
| 9064695 | Substrate processing apparatus, non-transitory computer-readable recording medium and method of manufacturing semiconductor device | Kazuyuki Toyoda, Kazuhiro Morimitsu, Taketoshi Sato, Tetsuo Yamamoto | 2015-06-23 |
| 9028191 | Substrate processing apparatus and method of manufacturing semiconductor device | Takeshi Yasui, Satoshi Takano, Ritsuo Horii, Makoto Kawabata | 2015-05-12 |
| 9018689 | Substrate processing apparatus and method of manufacturing semiconductor device | Naofumi Ohashi | 2015-04-28 |