Issued Patents All Time
Showing 1–25 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424409 | Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Teruo Yoshino, Naofumi Ohashi | 2025-09-23 |
| 12392032 | Substrate processing apparatus with cleaning of exhaust system | Yoshihiko YANAGISAWA, Naofumi Ohashi, Shun MATSUI | 2025-08-19 |
| 12387949 | Substrate processing apparatus | Teruo Yoshino, Naofumi Ohashi | 2025-08-12 |
| 12327755 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Naofumi Ohashi, Toshiyuki Kikuchi | 2025-06-10 |
| 12165894 | Processing method, method of manufacturing semiconductor, and substrate processing apparatus | Yasuhiro MIZUGUCHI, Naofumi Ohashi, Shun MATSUI | 2024-12-10 |
| 12093021 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Naofumi Ohashi, Toshiyuki Kikuchi, Shun MATSUI | 2024-09-17 |
| 11967513 | Substrate processing apparatus | Teruo Yoshino, Naofumi Ohashi | 2024-04-23 |
| 11923173 | Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Teruo Yoshino, Naofumi Ohashi | 2024-03-05 |
| 11749550 | Method of manufacturing semiconductor device by setting process chamber maintenance enable state | Yasuhiro MIZUGUCHI, Naofumi Ohashi, Shun MATSUI | 2023-09-05 |
| 11747789 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Naofumi Ohashi, Toshiyuki Kikuchi, Shun MATSUI | 2023-09-05 |
| 11538661 | Substrate processing apparatus | Teruo Yoshino, Naofumi Ohashi | 2022-12-27 |
| 11530481 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Naofumi Ohashi, Hidehiro Yanai | 2022-12-20 |
| 11422528 | Substrate processing system, method of manufacturing semiconductor device, and recording medium | Yasuhiro MIZUGUCHI, Shun MATSUI, Naofumi Ohashi | 2022-08-23 |
| 11380540 | Substrate processing apparatus | Takashi Nakagawa, Yoshiro Hirose, Naofumi Ohashi | 2022-07-05 |
| 11355372 | Method of manufacturing semiconductor device by setting process chamber to maintenance enable state | Yasuhiro MIZUGUCHI, Naofumi Ohashi, Shun MATSUI | 2022-06-07 |
| 11342212 | Method of manufacturing semiconductor device by setting process chamber maintenance enable state | Yasuhiro MIZUGUCHI, Naofumi Ohashi, Shun MATSUI | 2022-05-24 |
| 11314234 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Naofumi Ohashi, Toshiyuki Kikuchi, Shun MATSUI | 2022-04-26 |
| 11305986 | Method of manufacturing semiconductor device, substrate processing apparatus and program | Takashi Yahata, Naofumi Ohashi | 2022-04-19 |
| 11289350 | Method of manufacturing semiconductor device | Yukinori Aburatani, Takashi Yahata, Naofumi Ohashi, Shun MATSUI, Keita ICHIMURA | 2022-03-29 |
| 11104995 | Substrate processing apparatus | Takashi Yahata, Satoshi Takano, Kazuyuki Toyoda, Naofumi Ohashi | 2021-08-31 |
| 10978310 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium capable of adjusting substrate temperature | Tsukasa Kamakura, Mitsuro Tanabe, Naofumi Ohashi, Eisuke Nishitani, Shun MATSUI | 2021-04-13 |
| 10978361 | Substrate processing apparatus and recording medium | Takafumi Sasaki, Kazuhiro Morimitsu, Naofumi Ohashi, Shun MATSUI | 2021-04-13 |
| 10964531 | Method of manufacturing semiconductor device by supplying gas | Takashi Nakagawa, Yoshiro Hirose, Naofumi Ohashi | 2021-03-30 |
| 10934622 | Substrate processing apparatus | Teruo Yoshino, Naofumi Ohashi, Shun MATSUI | 2021-03-02 |
| 10930533 | Substrate processing apparatus, substrate processing system and method of manufacturing semiconductor device | Yasuhiro MIZUGUCHI, Naofumi Ohashi, Shun MATSUI | 2021-02-23 |