Issued Patents All Time
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12385139 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Daisuke Hara, Kenji Shinozaki, Kazuhiko Yamazaki | 2025-08-12 |
| 12136545 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Toshiyuki Kikuchi | 2024-11-05 |
| 12109479 | Exercise assistance device, exercise assistance method, and storage medium | Keisuke Shimada | 2024-10-08 |
| 11990347 | Method of manufacturing semiconductor device | Toshiyuki Kikuchi | 2024-05-21 |
| 11961715 | Substrate processing apparatus, substrate retainer and method of manufacturing semiconductor device | Daisuke Hara, Tsuyoshi Takeda, Kenji Ono, Kazuhiko Yamazaki | 2024-04-16 |
| 11891697 | Substrate processing apparatus | Naofumi Ohashi, Yukinori Aburatani, Shun MATSUI | 2024-02-06 |
| 11495435 | Substrate processing apparatus, non-transitory computer-readable recording medium, method of manufacturing semiconductor device, and a substrate processing method | Teruo Yoshino | 2022-11-08 |
| 11359285 | Substrate processing apparatus, heater and method of manufacturing semiconductor device | Hitoshi Murata, Yuichi Wada, Takatomo Yamaguchi, Shuhei Saido | 2022-06-14 |
| 11305986 | Method of manufacturing semiconductor device, substrate processing apparatus and program | Naofumi Ohashi, Tadashi Takasaki | 2022-04-19 |
| 11289350 | Method of manufacturing semiconductor device | Yukinori Aburatani, Tadashi Takasaki, Naofumi Ohashi, Shun MATSUI, Keita ICHIMURA | 2022-03-29 |
| 11264217 | Substrate processing apparatus | — | 2022-03-01 |
| 11145505 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Naofumi Ohashi, Ryuji Yamamoto | 2021-10-12 |
| 11104995 | Substrate processing apparatus | Satoshi Takano, Kazuyuki Toyoda, Naofumi Ohashi, Tadashi Takasaki | 2021-08-31 |
| 10914005 | Substrate processing apparatus having gas guide capable of suppressing gas diffusion | — | 2021-02-09 |
| 10796934 | Substrate processing apparatus, method of manufacturing semiconductor device and electrode fixing part | Tsuyoshi Takeda, Tatsuya NISHINO | 2020-10-06 |
| 10633739 | Substrate processing apparatus | Yukitomo HIROCHI | 2020-04-28 |
| 10597780 | Substrate processing apparatus, heater and method of manufacturing semiconductor device | Hitoshi Murata, Yuichi Wada, Takatomo Yamaguchi, Shuhei Saido | 2020-03-24 |
| 10541170 | Substrate processing apparatus and method of manufacturing semiconductor device | Naofumi Ohashi, Shun MATSUI | 2020-01-21 |
| 10453720 | Method of manufacturing semiconductor device | Yukinori Aburatani, Tadashi Takasaki, Naofumi Ohashi, Shun MATSUI, Keita ICHIMURA | 2019-10-22 |
| 10184177 | Substrate processing apparatus capable of adjusting flow rate of inert gas supplied to substrate | — | 2019-01-22 |
| 10143406 | Feature-quantity extracting apparatus | Takao Kanke | 2018-12-04 |
| 10092537 | Use for PAI-1 inhibitor | Kiyoshi Ando, Toshio Miyata | 2018-10-09 |
| 9957616 | Substrate processing apparatus and heating unit | Hitoshi Murata, Yuichi Wada, Hidenari Yoshida, Shuhei Saido | 2018-05-01 |
| D795209 | Heater for semiconductor thermal process | Hitoshi Murata, Yuichi Wada, Takatomo Yamaguchi, Shuhei Saido | 2017-08-22 |
| D793975 | Heater for semiconductor thermal process | Hitoshi Murata, Yuichi Wada, Hidenari Yoshida, Shuhei Saido | 2017-08-08 |