Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293930 | Substrate processing apparatus, method of manufacturing semiconductor device and heater | Shinobu Sugiura, Masaaki Ueno, Tetsuya Kosugi, Masashi Sugishita, Tomoyuki Yamada | 2025-05-06 |
| 12241159 | Substrate processing apparatus and ceiling heater | Tetsuya Kosugi, Shuhei Saido | 2025-03-04 |
| 11906367 | Substrate temperature sensor, substrate retainer and substrate processing apparatus | Tokunobu Akao, Akinori Tanaka, Masaaki Ueno | 2024-02-20 |
| 11359285 | Substrate processing apparatus, heater and method of manufacturing semiconductor device | Takashi Yahata, Yuichi Wada, Takatomo Yamaguchi, Shuhei Saido | 2022-06-14 |
| 11043402 | Cooling unit, heat insulating structure, and substrate processing apparatus | Tetsuya Kosugi, Masaaki Ueno | 2021-06-22 |
| 10597780 | Substrate processing apparatus, heater and method of manufacturing semiconductor device | Takashi Yahata, Yuichi Wada, Takatomo Yamaguchi, Shuhei Saido | 2020-03-24 |
| D860419 | Electric furnace for substrate processing apparatus | Tetsuya Kosugi, Masaaki Ueno | 2019-09-17 |
| D860420 | Electric furnace for substrate processing apparatus | Tetsuya Kosugi, Masaaki Ueno | 2019-09-17 |
| 10340151 | Substrate processing apparatus, heating apparatus, ceiling heat insulator, and method of manufacturing semiconductor device | Tetsuya Kosugi, Motoya Takewaki, Masaaki Ueno | 2019-07-02 |
| D819463 | Protector tube for thermocouple | Tokunobu Akao, Atushi Umekawa, Masaaki Ueno, Tetsuya Kosugi, Masashi Sugishita +1 more | 2018-06-05 |
| D818850 | Protector tube for thermocouple | Tokunobu Akao, Atushi Umekawa, Masaaki Ueno, Tetsuya Kosugi, Masashi Sugishita +1 more | 2018-05-29 |
| 9957616 | Substrate processing apparatus and heating unit | Yuichi Wada, Takashi Yahata, Hidenari Yoshida, Shuhei Saido | 2018-05-01 |
| 9779970 | Heater supporting device | Tetsuya Kosugi, Shinobu Sugiura, Masaaki Ueno | 2017-10-03 |
| D795209 | Heater for semiconductor thermal process | Yuichi Wada, Takashi Yahata, Takatomo Yamaguchi, Shuhei Saido | 2017-08-22 |
| D793974 | Heater for semiconductor thermal process | Takatomo Yamaguchi | 2017-08-08 |
| D793975 | Heater for semiconductor thermal process | Yuichi Wada, Takashi Yahata, Hidenari Yoshida, Shuhei Saido | 2017-08-08 |
| 9695511 | Substrate processing apparatus, method of manufacturing semiconductor device and method of processing substrate | Tetsuya Kosugi, Masaaki Ueno, Masashi Sugishita | 2017-07-04 |
| 9587884 | Insulation structure and method of manufacturing semiconductor device | Tetsuya Kosugi, Motoya Takewaki, Masaaki Ueno | 2017-03-07 |
| 9460946 | Substrate processing apparatus and heating equipment | Tetsuya Kosugi | 2016-10-04 |
| 9449849 | Method of manufacturing semiconductor device using meander-shaped heating element | Tetsuya Kosugi, Shinobu Sugiura | 2016-09-20 |
| 9064912 | Heating device, substrate processing apparatus, and method of manufacturing semiconductor device | Tetsuya Kosugi, Shinobu Sugiura, Masaaki Ueno | 2015-06-23 |
| 8847124 | Heating device having a meander-shaped heating element with an insulating body accomodating the same, and the substrate processing apparatus including the same | Tetsuya Kosugi, Shinobu Sugiura | 2014-09-30 |
| 8535444 | Substrate processing apparatus, method of manufacturing semiconductor device, and ceiling insulating part | Tetsuya Kosugi, Shinobu Sugiura | 2013-09-17 |
| 8277560 | CVD apparatus and method of cleaning the CVD apparatus | Katsuo Sakai, Seiji Okura, Masaji Sakamura, Kaoru Abe, Etsuo Wani +5 more | 2012-10-02 |
| 8043438 | Device for cleaning CVD device and method of cleaning CVD device | Katsuo Sakai, Kaoru Abe, Seiji Okura, Masaji Sakamura, Kenji Kameda +2 more | 2011-10-25 |