Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293930 | Substrate processing apparatus, method of manufacturing semiconductor device and heater | Shinobu Sugiura, Tetsuya Kosugi, Hitoshi Murata, Masashi Sugishita, Tomoyuki Yamada | 2025-05-06 |
| 12085338 | Heater, temperature control system, and processing apparatus | Tetsuya Kosugi, Shinobu Sugiura, Masashi Sugishita | 2024-09-10 |
| 11906367 | Substrate temperature sensor, substrate retainer and substrate processing apparatus | Tokunobu Akao, Hitoshi Murata, Akinori Tanaka | 2024-02-20 |
| 11761087 | Substrate processing apparatus and non-transitory computer-readable recording medium | Masashi Sugishita | 2023-09-19 |
| 11395102 | Field cooperation system and management device | Tomomi HISHINUMA, Kenji Osaki, Shota Saito | 2022-07-19 |
| 11049742 | Substrate processing apparatus, method of manufacturing semiconductor device, and thermocouple support | Hideto Yamaguchi, Tetsuya Kosugi | 2021-06-29 |
| 11043402 | Cooling unit, heat insulating structure, and substrate processing apparatus | Tetsuya Kosugi, Hitoshi Murata | 2021-06-22 |
| 10415136 | Substrate processing apparatus including heating and cooling device, and ceiling part included in the same | Motoya Takewaki, Tetsuya Kosugi | 2019-09-17 |
| D860420 | Electric furnace for substrate processing apparatus | Tetsuya Kosugi, Hitoshi Murata | 2019-09-17 |
| D860419 | Electric furnace for substrate processing apparatus | Tetsuya Kosugi, Hitoshi Murata | 2019-09-17 |
| 10418293 | Substrate processing apparatus, method of manufacturing semiconductor device, and thermocouple support | Hideto Yamaguchi, Tetsuya Kosugi | 2019-09-17 |
| 10340151 | Substrate processing apparatus, heating apparatus, ceiling heat insulator, and method of manufacturing semiconductor device | Tetsuya Kosugi, Motoya Takewaki, Hitoshi Murata | 2019-07-02 |
| D819463 | Protector tube for thermocouple | Tokunobu Akao, Atushi Umekawa, Tetsuya Kosugi, Hitoshi Murata, Masashi Sugishita +1 more | 2018-06-05 |
| D818850 | Protector tube for thermocouple | Tokunobu Akao, Atushi Umekawa, Tetsuya Kosugi, Hitoshi Murata, Masashi Sugishita +1 more | 2018-05-29 |
| D803075 | Thermometry tool for substrate processing apparatus | Tokunobu Akao, Motoya Takewaki, Akihiro Osaka, Tetsuya Kosugi, Masashi Sugishita | 2017-11-21 |
| 9779970 | Heater supporting device | Tetsuya Kosugi, Hitoshi Murata, Shinobu Sugiura | 2017-10-03 |
| 9695511 | Substrate processing apparatus, method of manufacturing semiconductor device and method of processing substrate | Hitoshi Murata, Tetsuya Kosugi, Masashi Sugishita | 2017-07-04 |
| 9587884 | Insulation structure and method of manufacturing semiconductor device | Tetsuya Kosugi, Motoya Takewaki, Hitoshi Murata | 2017-03-07 |
| 9418881 | Substrate processing apparatus capable of switching control mode of heater | Shinobu Sugiura, Kazuo Tanaka, Masashi Sugishita, Hideto Yamaguchi, Kenji Shirako | 2016-08-16 |
| 9269638 | Temperature detecting apparatus, substrate processing apparatus and method of manufacturing semiconductor device | Tetsuya Kosugi, Hideto Yamaguchi | 2016-02-23 |
| 9184069 | Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and insulator | Akira Hayashida, Masakazu Shimada, Masashi Sugishita, Toshimitsu Miyata, Kimio Kitamura +2 more | 2015-11-10 |
| 9064912 | Heating device, substrate processing apparatus, and method of manufacturing semiconductor device | Hitoshi Murata, Tetsuya Kosugi, Shinobu Sugiura | 2015-06-23 |
| 8822240 | Temperature detecting apparatus, substrate processing apparatus and method of manufacturing semiconductor device | Tetsuya Kosugi, Hideto Yamaguchi | 2014-09-02 |
| 8734148 | Heat treatment apparatus and method of manufacturing semiconductor device | Keishin Yamazaki, Akira Hayashida, Manabu Izumi, Katsuaki NOGAMI | 2014-05-27 |
| 8507296 | Substrate processing method and film forming method | Masakazu Shimada, Takeo Hanashima, Haruo Morikawa, Akira Hayashida | 2013-08-13 |