Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387969 | Substrate processing apparatus, substrate holding apparatus, and method of manufacturing semiconductor device | Norichika Yamagishi | 2025-08-12 |
| 11377730 | Substrate processing apparatus and furnace opening cover | Kosuke Takagi, Shinya Morita, Naonori Akae | 2022-07-05 |
| 10351951 | Substrate treatment apparatus including reaction tube with opened lower end, furnace opening member, and flange configured to cover upper surface of the furnace opening member | Satoru Murata, Shinya Morita | 2019-07-16 |
| 9816182 | Substrate processing apparatus, method for manufacturing semiconductor device, and recording medium | Hideto Tateno, Yuichi Wada, Hiroshi Ashihara, Takurou Ushida, Iwao Nakamura +1 more | 2017-11-14 |
| D739832 | Reaction tube | Masahiro Miyake, Shinya Morita, Kosuke Takagi, Yasuaki Komae, Naonori Akae +3 more | 2015-09-29 |
| D725055 | Reaction tube | Masahiro Miyake, Kosuke Takagi, Yasuaki Komae, Shinya Morita, Naonori Akae +1 more | 2015-03-24 |
| 8963051 | Heat treatment apparatus and method of manufacturing substrates | Tomoharu SHIMADA, Akira Morohashi, Kojiro Yokozawa | 2015-02-24 |
| D720707 | Reaction tube | Masahiro Miyake, Kosuke Takagi, Yasuaki Komae, Shinya Morita, Naonori Akae +1 more | 2015-01-06 |
| D719114 | Reaction tube | Masahiro Miyake, Kosuke Takagi, Yasuaki Komae, Shinya Morita, Naonori Akae +1 more | 2014-12-09 |
| D711843 | Reaction tube | Masahiro Miyake, Kosuke Takagi, Yasuaki Komae, Shinya Morita, Naonori Akae +1 more | 2014-08-26 |
| 8734148 | Heat treatment apparatus and method of manufacturing semiconductor device | Akira Hayashida, Masaaki Ueno, Manabu Izumi, Katsuaki NOGAMI | 2014-05-27 |
| 7901206 | Heat-treating apparatus and method of producing substrates | Akira Morohashi, Iwao Nakamura, Ryota Sasajima, Sadao Nakashima | 2011-03-08 |
| 7820118 | Substrate processing apparatus having covered thermocouple for enhanced temperature control | Iwao Nakamura, Ryota Sasajima | 2010-10-26 |