Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9966251 | Method of manufacturing semiconductor device and substrate processing apparatus | Ryota Sasajima, Yoshiro Hirose, Yosuke Ota, Naonori Akae | 2018-05-08 |
| 9966252 | Method of manufacturing semiconductor device and substrate processing apparatus | Ryota Sasajima, Yoshiro Hirose, Yosuke Ota, Naonori Akae | 2018-05-08 |
| 9039838 | Method of manufacturing semiconductor device and substrate processing apparatus | Ryota Sasajima, Yoshiro Hirose, Yosuke Ota, Naonori Akae | 2015-05-26 |
| 8963051 | Heat treatment apparatus and method of manufacturing substrates | Tomoharu SHIMADA, Akira Morohashi, Keishin Yamazaki | 2015-02-24 |
| 8252701 | Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus | Ryota Sasajima, Yoshiro Hirose, Yosuke Ota, Naonori Akae | 2012-08-28 |