Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9373532 | Guide apparatus, exposure apparatus, and method of manufacturing article | Nobushige Korenaga | 2016-06-21 |
| 9280068 | Stage apparatus with flexible utility line, lithography apparatus, and article manufacturing method | Tadashi Kimura, Nobushige Korenaga | 2016-03-08 |
| 9124151 | Driving apparatus, exposure apparatus, and method of manufacturing article | Nobushige Korenaga | 2015-09-01 |
| 8963051 | Heat treatment apparatus and method of manufacturing substrates | Tomoharu SHIMADA, Kojiro Yokozawa, Keishin Yamazaki | 2015-02-24 |
| 7901206 | Heat-treating apparatus and method of producing substrates | Iwao Nakamura, Ryota Sasajima, Keishin Yamazaki, Sadao Nakashima | 2011-03-08 |
| 7891975 | Heat treatment apparatus and method of manufacturing substrate | Ryota Sasajima, Iwao Nakamura, Ryuji Yamamoto | 2011-02-22 |
| 6905963 | Fabrication of B-doped silicon film by LPCVD method using BCI3 and SiH4 gases | Takaaki Noda, Junji Asahi | 2005-06-14 |