Issued Patents All Time
Showing 1–25 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9977347 | Positioning apparatus, lithography apparatus, and method of manufacturing article | Kentaro Suzuki, Satoshi Iwatani | 2018-05-22 |
| 9947508 | Lithography apparatus, and method of manufacturing an article | Daisuke Iwase | 2018-04-17 |
| 9823587 | Lithography apparatus, stage apparatus, and method of manufacturing articles | Tadashi Kimura | 2017-11-21 |
| 9547242 | Lithography apparatus, and method of manufacturing article | Atsushi Ito | 2017-01-17 |
| 9373532 | Guide apparatus, exposure apparatus, and method of manufacturing article | Akira Morohashi | 2016-06-21 |
| 9310688 | Processing apparatus and article manufacturing method using same | Daisuke Iwase | 2016-04-12 |
| 9280068 | Stage apparatus with flexible utility line, lithography apparatus, and article manufacturing method | Akira Morohashi, Tadashi Kimura | 2016-03-08 |
| 9280066 | Stage apparatus, lithography apparatus and method of manufacturing article | Hiroshi Kii | 2016-03-08 |
| 9124151 | Driving apparatus, exposure apparatus, and method of manufacturing article | Akira Morohashi | 2015-09-01 |
| 8834769 | Imprint apparatus for forming a pattern of a resin on a substrate using a mold | — | 2014-09-16 |
| 8810770 | Exposure apparatus and article manufacturing method | Yuji Maehara | 2014-08-19 |
| 8562323 | Imprint apparatus and method for producing article | Hirohito Ito, Makoto Miyazaki | 2013-10-22 |
| 8476607 | Charged particle beam drawing apparatus and article manufacturing method | Tomonori Ishikawa | 2013-07-02 |
| 7547998 | Aligning apparatus including an attraction preventing plate provided between permanent magnet and magnetic member | — | 2009-06-16 |
| 7508099 | Driving apparatus, exposure apparatus, and device manufacturing method | — | 2009-03-24 |
| 7383929 | Anti-vibration technique | — | 2008-06-10 |
| 7348695 | Linear motor, moving stage system, exposure apparatus, and device manufacturing method | Toshiya Asano | 2008-03-25 |
| 7307692 | Exposure apparatus and device manufacturing method | Naosuke Nishimura | 2007-12-11 |
| 7282819 | Stage apparatus, exposure apparatus, and device manufacturing method | — | 2007-10-16 |
| 7280185 | Stage system including fine-motion cable unit, exposure apparatus, and method of manufacturing device | — | 2007-10-09 |
| 7227284 | Alignment apparatus and exposure apparatus using the same | — | 2007-06-05 |
| 7075198 | Alignment apparatus and exposure apparatus using the same | — | 2006-07-11 |
| 7075197 | Aligning apparatus, exposure apparatus, and device manufacturing method | — | 2006-07-11 |
| 7067942 | Linear motor, moving stage system, exposure apparatus, and device manufacturing method | Toshiya Asano | 2006-06-27 |
| 7057710 | Stage system including fine-motion cable unit, exposure apparatus, and method of manufacturing device | — | 2006-06-06 |