Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9291912 | Exposure apparatus and method of manufacturing article | Shinya Mochizuki | 2016-03-22 |
| 8810770 | Exposure apparatus and article manufacturing method | Nobushige Korenaga | 2014-08-19 |