Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12386274 | Stage device, lithography apparatus, and article manufacturing method | — | 2025-08-12 |
| 12044962 | Forming apparatus, forming method, and article manufacturing method | Byung-Jin Choi, Makoto Mizuno | 2024-07-23 |
| 11543745 | Stage driving apparatus, lithography apparatus, and method of manufacturing article | — | 2023-01-03 |
| 10185226 | Stage apparatus, lithography apparatus, and method of manufacturing article | — | 2019-01-22 |
| 9977347 | Positioning apparatus, lithography apparatus, and method of manufacturing article | Kentaro Suzuki, Nobushige Korenaga | 2018-05-22 |
| 8159093 | Motor apparatus, manufacturing method, exposure apparatus, and device fabrication method | Yoshikazu Miyajima | 2012-04-17 |