Issued Patents All Time
Showing 1–25 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10558117 | Imprint apparatus and article manufacturing method | Van Nguyen Truskett, Matthew S. Shafran, Saul S. Lee | 2020-02-11 |
| 10409156 | Mold, imprint apparatus, and method of manufacturing article | Byung-Jin Choi, Mahadevan GanapathiSubramanian, Naoki Murasato | 2019-09-10 |
| 10406743 | Imprint apparatus, imprint method, and method of manufacturing article | Hiromitsu Yamaguchi, Yasuyuki Tamura, Akio Saito | 2019-09-10 |
| 10406731 | Application device, imprinting apparatus, and method for manufacturing object | Tsuyoshi Arai, Yutaka Mita, Akio Saito | 2019-09-10 |
| 10335984 | Imprint apparatus and article manufacturing method | Byung-Jin Choi, Anshuman Cherala, Zhengmao Ye, Xiaoming Lu, Kang Luo +1 more | 2019-07-02 |
| 10199244 | Imprint apparatus, and method of manufacturing article | Nobuto Kawahara, Zhengmao Ye, Anshuman Cherala, Byung-Jin Choi, Xiaoming Lu +1 more | 2019-02-05 |
| 10197910 | Imprint apparatus, imprint method, and method of manufacturing article | Hiromitsu Yamaguchi | 2019-02-05 |
| 10112324 | Imprint method, imprint apparatus, and production method for article | Yukio Takabayashi, Shinichi Shudo | 2018-10-30 |
| 10022900 | Application device, imprinting apparatus, and method for manufacturing object | Tsuyoshi Arai, Yutaka Mita, Akio Saito | 2018-07-17 |
| 9952504 | Imprint method, imprint apparatus, and method for manufacturing device | Yukio Takabayashi, Shinichi Shudo | 2018-04-24 |
| 9927725 | Lithography apparatus, lithography method, program, lithography system, and article manufacturing method | Hitoshi Nakano | 2018-03-27 |
| 9915881 | Lithography apparatus and article manufacturing method | Hitoshi Nakano | 2018-03-13 |
| 8159093 | Motor apparatus, manufacturing method, exposure apparatus, and device fabrication method | Satoshi Iwatani | 2012-04-17 |
| 7999919 | Substrate holding technique | Hideo Tanaka | 2011-08-16 |
| 7602476 | Substrate-holding technique | — | 2009-10-13 |
| 7463335 | Exposure apparatus, and device manufacturing method | Takashi Meguro | 2008-12-09 |
| 7426013 | Exposure apparatus and device fabrication method | — | 2008-09-16 |
| 7423724 | Exposure apparatus and device manufacturing method | Noriyasu Hasegawa, Tatsuya Hayashi | 2008-09-09 |
| 7408276 | Plane motor device with surrounding member surrounding coil unit and with cooling channel provided within surrounding member | Hitoshi Sato, Yasuhito Sasaki | 2008-08-05 |
| 7391495 | Stage apparatus, exposure system using the same, and device manufacturing method | Yasuhito Sasaki, Hitoshi Sato | 2008-06-24 |
| 7379162 | Substrate-holding technique | — | 2008-05-27 |
| 7349063 | Reflection mirror apparatus, exposure apparatus and device manufacturing method | — | 2008-03-25 |
| 7345737 | Exposure method and apparatus having a projection optical system in which a projection gap is filled with liquid | — | 2008-03-18 |
| 7321418 | Stage apparatus, exposure apparatus, and device manufacturing method | Yasuhito Sasaki, Naosuke Nishimura, Hideo Tanaka, Toshihiko Nishida | 2008-01-22 |
| 7319510 | Stage device, exposure apparatus using the unit, and device manufacturing method | — | 2008-01-15 |