| 12282251 |
Method of shaping a surface, shaping system, and method of manufacturing an article |
Seth J. Bamesberger, Byung-Jin Choi |
2025-04-22 |
| 12027373 |
Planarization process, planarization system, and method of manufacturing an article |
Steven C. Shackleton, Seth J. Bamesberger, Byung-Jin Choi |
2024-07-02 |
| 12015628 |
Complex network attack detection method based on cross-host abnormal behavior recognition |
Mingqi Lv, Haiwen Liu, Haijiang Xie, Tiantian Zhu, Tieming Chen +1 more |
2024-06-18 |
| 11994797 |
System and method for shaping a film with a scaled calibration measurement parameter |
Nilabh K. Roy, Mario Johannes Meissl |
2024-05-28 |
| 11869813 |
Planarization apparatus, planarization process, and method of manufacturing an article |
— |
2024-01-09 |
| 11614693 |
Method of determining the initial contact point for partial fields and method of shaping a surface |
Logan L. Simpson, Mario Johannes Meissl |
2023-03-28 |
| 11587795 |
Planarization apparatus including superstrate chuck with bendable periphery |
— |
2023-02-21 |
| 11161280 |
Strain and kinetics control during separation phase of imprint process |
Niyaz Khusnatdinov, Frank Y. Xu, Mario Johannes Meissl, Michael Nevin Miller, Ecron D. Thompson +3 more |
2021-11-02 |
| 10654216 |
System and methods for nanoimprint lithography |
Philip D. Schumaker, Byung-Jin Choi |
2020-05-19 |
| 10597840 |
Hot-melt anchor head |
Jianming Zhou, Huiju Fan, Mingxiang Du |
2020-03-24 |
| 10444624 |
Active metrology frame and thermal frame temperature control in imprint lithography |
Byung-Jin Choi, Steven L. Hartmann |
2019-10-15 |
| 10409178 |
Alignment control in nanoimprint lithography based on real-time system identification |
Byung-Jin Choi |
2019-09-10 |
| 10335984 |
Imprint apparatus and article manufacturing method |
Byung-Jin Choi, Anshuman Cherala, Zhengmao Ye, Kang Luo, Nobuto Kawahara +1 more |
2019-07-02 |
| 10248018 |
Imprint apparatus and method of manufacturing article |
Philip D. Schumaker, Wei Zhang, Atsushi Kimura, Jun Ota |
2019-04-02 |
| 10199244 |
Imprint apparatus, and method of manufacturing article |
Nobuto Kawahara, Yoshikazu Miyajima, Zhengmao Ye, Anshuman Cherala, Byung-Jin Choi +1 more |
2019-02-05 |
| 9996147 |
High temperature and high humidity testing device and high temperature and high humidity testing system |
Yan Jiang, Xianzhen Tang, Dan Li, Xiaowei Gong, Chiyoung Kim |
2018-06-12 |
| 9090014 |
High throughput imprint based on contact line motion tracking control |
Philip D. Schumaker |
2015-07-28 |
| 8984270 |
Data file decryption method, decryption device and data broadcasting system |
Jingyu Dong, Huiyuan Zhang, Yong Li |
2015-03-17 |
| 8959343 |
Authentication system, method and device |
Lijun Liu, Bo Yang, Huaxi Peng, Jing Wang |
2015-02-17 |
| 8945444 |
High throughput imprint based on contact line motion tracking control |
Philip D. Schumaker |
2015-02-03 |
| 8880873 |
Method, system and device for authenticating cardless terminal using application server |
— |
2014-11-04 |
| 8652393 |
Strain and kinetics control during separation phase of imprint process |
Niyaz Khusnatdinov, Frank Y. Xu, Mario Johannes Meissl, Michael Nevin Miller, Ecron D. Thompson +3 more |
2014-02-18 |
| 7635445 |
Method of separating a mold from a solidified layer disposed on a substrate |
Byung-Jin Choi, Anshuman Cherala, Yeong-Jun Choi, Mario Johannes Meissl, Sidlgata V. Sreenivasan +3 more |
2009-12-22 |
