Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283522 | Planarization apparatus, planarization process, and method of manufacturing an article | Ozkan Ozturk, Christopher Ellis Jones, Se-Hyuk Im | 2025-04-22 |
| 12282251 | Method of shaping a surface, shaping system, and method of manufacturing an article | Byung-Jin Choi, Xiaoming Lu | 2025-04-22 |
| 12242205 | Reaction chamber with stop-gapped vacuum seal | Byung-Jin Choi, Alex Ruiz | 2025-03-04 |
| 12165903 | Chuck assembly, planarization process, apparatus and method of manufacturing an article | Se-Hyuk Im, Byung-Jin Choi | 2024-12-10 |
| 12138747 | Planarization process, apparatus and method of manufacturing an article | Byung-Jin Choi, Ozkan Ozturk, Masaki Saito | 2024-11-12 |
| 12027373 | Planarization process, planarization system, and method of manufacturing an article | Steven C. Shackleton, Xiaoming Lu, Byung-Jin Choi | 2024-07-02 |
| 11908711 | Planarization process, planarization system and method of manufacturing an article | Steven C. Shackleton, Masaki Saito | 2024-02-20 |
| 11776840 | Superstrate chuck, method of use, and method of manufacturing an article | Nilabh K. Roy, Mario Johannes Meissl, Ozkan Ozturk, Byung-Jin Choi | 2023-10-03 |
| 11725272 | Method, system and apparatus for cooling a substrate | Byung-Jin Choi, Alex Ruiz, Nilabh K. Roy | 2023-08-15 |
| 11728203 | Chuck assembly, planarization process, apparatus and method of manufacturing an article | Se-Hyuk Im, Byung-Jin Choi | 2023-08-15 |
| 11590687 | Systems and methods for reducing pressure while shaping a film | Niyaz Khusnatdinov, Mario Johannes Meissl | 2023-02-28 |
| 11562924 | Planarization apparatus, planarization process, and method of manufacturing an article | Ozkan Ozturk, Christopher Ellis Jones, Se-Hyuk Im | 2023-01-24 |
| 11198235 | Flexible mask modulation for controlling atmosphere between mask and substrate and methods of using the same | — | 2021-12-14 |
| 11145535 | Planarization process, apparatus and method of manufacturing an article | Byung-Jin Choi, Se-Hyuk Im | 2021-10-12 |
| 11043407 | Planarization process, apparatus and method of manufacturing an article | Byung-Jin Choi, Masaki Saito, Ozkan Ozturk | 2021-06-22 |
| 11040366 | Dispenser shield with adjustable aperture to improve drop placement and residual layer thickness | Logan L. Simpson, John Williamson | 2021-06-22 |
| 11034057 | Planarization process, apparatus and method of manufacturing an article | Ozkan Ozturk, Masaki Saito, Alireza Aghili, Steven C. Shackleton, Byung-Jin Choi | 2021-06-15 |
| 10996561 | Nanoimprint lithography with a six degrees-of-freedom imprint head module | Jeremy Lee Sevier, Byung-Jin Choi, Philip D. Schumaker, Mario Johannes Meissl | 2021-05-04 |
| 10895806 | Imprinting method and apparatus | Mehul N. Patel, Edward Brian Fletcher, Alireza Aghili | 2021-01-19 |
| 10754078 | Light source, a shaping system using the light source and an article manufacturing method | — | 2020-08-25 |
| 10416576 | Optical system for use in stage control | Yeshwanth Srinivasan, Philip D. Schumaker | 2019-09-17 |
| 9971249 | Method and system for controlled ultraviolet light exposure | Yeshwanth Srinivasan | 2018-05-15 |
| 9778578 | Low contact imprint lithography template chuck system for improved overlay correction | Mario Johannes Meissl, Anshuman Cherala, Byung-Jin Choi | 2017-10-03 |