| 12242204 |
Substrate support, lithographic apparatus, method for manipulating charge distribution and method for preparing a substrate |
Koen Gerhardus Winkels, Dirk Willem Harberts, Lucas Henricus Johannes Stevens, Dennis Dominic VAN DER VOORT, Edwin Johannes Cornelis Bos +2 more |
2025-03-04 |
| 12007693 |
Laser focussing module |
Nico Johannes Antonius Hubertus Boonen, Stefan Michael Bruno Bäumer, Tolga Ergin, Andreas Hopf, Derk Jan Wilfred Klunder +7 more |
2024-06-11 |
| 10061213 |
Sensor, object positioning system, lithographic apparatus and device manufacturing method |
Johannes Antonius Gerardus Akkermans, Sander Christiaan Broers, Jeroen Johannes Theodorus Hendrikus De Best, Adrianus Marinus Wouter Heeren, George Alois Leonie Leenknegt +6 more |
2018-08-28 |
| 9983482 |
Radiation collector, radiation source and lithographic apparatus |
Erik Roelof Loopstra, Olav Waldemar Vladimir Frijns, Stig Bieling, Antonius Theodorus Wilhelmus Kempen, Ivo Vanderhallen +6 more |
2018-05-29 |
| 9785060 |
Stage system and lithographic apparatus comprising such stage system |
Rob Johan Theodoor Rutten, Jan Steven Christiaan Westerlaken, Koen Jacobus Johannes Maria Zaal, Richard Henricus Adrianus Van Lieshout, Engelbertus Antonius Fransiscus Van Der Pasch |
2017-10-10 |
| 9575416 |
Lithographic apparatus, device manufacturing method and displacement measurement system |
Engelbertus Antonius Fransiscus Van Der Pasch, Martinus Agnes Willem Cuijpers, Christiaan Alexander Hoogendam, Fransiscus Mathijs Jacobs, Willem Herman Gertruda Anna Koenen +1 more |
2017-02-21 |
| 9507277 |
Lithographic apparatus and device manufacturing method |
Wilhelmus Henricus Theodorus Maria Aangenent, Johannes Petrus Martinus Bernardus Vermeulen, Rick Scholte, Ines Lopez Arteaga |
2016-11-29 |
| 9494869 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Arno Jan Bleeker, Pieter Renaat Maria Hennus, Martinus Hendricus Hoeks, Sven Antoin Johan Hol +9 more |
2016-11-15 |
| 9410796 |
Lithographic apparatus and method |
Engelbertus Antonius Fransiscus Van Der Pasch, Johannes Petrus Martinus Bernardus Vermeulen, Theodorus Petrus Maria Cadee, Raymond Wilhelmus Louis Lafarre |
2016-08-09 |
| 9383659 |
Positioning system, lithographic apparatus and device manufacturing method |
Andre Bernardus Jeunink, Marinus Maria Johannes Van De Wal, Wilhelmus Henricus Theodorus Maria Aangenent, Richard Henricus Adrianus Van Lieshout, Henricus Martinus Johannes Van De Groes +1 more |
2016-07-05 |
| 9360774 |
Lithographic apparatus with a deformation sensor |
Johannes Hendrikus Maria Spruit, Richard Henricus Adrianus Van Lieshout, Cristian Dan |
2016-06-07 |
| 9335641 |
Optical element mount for lithographic apparatus |
Henricus Gerardus Tegenbosch, Alexander Matthijs Struycken, Jacob Kleijn, Ivo Vanderhallen |
2016-05-10 |
| 9207547 |
Lithographic apparatus and device manufacturing method |
Johannes Hendrikus Maria Spruit |
2015-12-08 |
| 9182683 |
Lithographic apparatus and lithographic projection method |
Antonius Franciscus Johannes De Groot |
2015-11-10 |
| 9141003 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Engelbertus Antonius Fransiscus Van Der Pasch, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Johannes Petrus Martinus Bernardus Vermeulen |
2015-09-22 |
| 9141004 |
Lithographic apparatus and method |
Johannes Petrus Martinus Bernardus Vermeulen, Johannes Antonius Gerardus Akkermans, Marinus Maria Johannes Van De Wal, Yang-Shan Huang, Wilhelmus Henricus Theodorus Maria Aangenent |
2015-09-22 |
| 8976335 |
Lithographic apparatus and removable member |
Theodorus Petrus Maria Cadee |
2015-03-10 |
| 8836913 |
Lithographic apparatus having an encoder type position sensor system |
Peter Paul Steijaert, Wilhelmus Josephus Box, Emiel Jozef Melanie Eussen, Erik Roelof Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch +1 more |
2014-09-16 |
| 8760615 |
Lithographic apparatus having encoder type position sensor system |
Peter Paul Steijaert, Wilhelmus Josephus Box, Emiel Jozef Melanie Eussen, Erik Roelof Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch +1 more |
2014-06-24 |
| 8736815 |
Position sensor and lithographic apparatus |
Antonius Franciscus Johannes De Groot, Johannes Petrus Martinus Bernardus Vermeulen |
2014-05-27 |
| 8687166 |
Lithographic apparatus having an encoder position sensor system |
Peter Paul Steijaert, Wilhelmus Josephus Box, Emiel Jozef Melanie Eussen, Erik Roelof Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch +1 more |
2014-04-01 |
| 8334983 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Engelbertus Antonius Fransiscus Van Der Pasch, Johannes Petrus Martinus Bernardus Vermeulen, Fransiscus Mathijs Jacobs |
2012-12-18 |
| 7999912 |
Lithographic apparatus and sensor calibration method |
Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen, Stefan Gertrud Marie Hendriks, Erik Roelof Loopstra, Jacob Willem Vink +2 more |
2011-08-16 |